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303
ULTRA-CLEAN VALVES
SEAT MATERIAL SELECTION
Gas
Molecular
Formula
State*
Seat Materials** Diaphragm Valve
PCTFE Pi Metal
AMMONIA NH3 L.G
ARGON Ar G [ ] [ ] [ ]
ARSINE ASH3 C.G [ ] [ ] [ ]
BORON TRICHLORIDE BCI3 L.G
BORON TRICHLORIDE BF3 C.G
CHLORINE CI3 L.G X
DIBORANE B2H6 C.G
DICHLORO SILANE SiH2CI2 L.G
DISILANE Si2H6 G
DI-CHLORO DI-FLUORO
METHANE
CCI2F2 L.G [ ] [ ] [ ]
MONO-CHLORO TRI-FLUORO METHANE CCIF3 L.G [ ] [ ] [ ]
TETRA FLUORO METHANE CF4 G [ ] [ ] [ ]
TRI FLUORO METHANE CHF3 L.G [ ] [ ] [ ]
HEXA-FLUORO METHANE C2F4 L.G [ ] [ ] [ ]
HELIUM He G [ ] [ ] [ ]
HYDROGEN H2 G [ ] [ ] [ ]
HYDROGEN BROMIDE HBr C.G [X]
HYDROGEN CHLORIDE HCI L.G X
HYDROGEN SULFIDE H2S L.G X
NITOROGEN N2 G [ ] [ ] [ ]
NITOROGEN TRIFLUORIE NF3 G [ ] [ ] [ ]
NITOROGEN OXIDE N2O L.G
OXIGEN O2 G [ ] [ ] [ ]
PHOSPHINE
PH3:PURE
PH3:MIX
G
SILANE SiH4 G
SILICON TERACHLORID SiCI4 L.G
SULFER HEXAFLORIDE SF6 L.G
TUNGSTEN HEXAFLUORIDE WF6 L.G
To make a safe choice when selecting your product, review the entire design of your system implementation to ensure safe, trouble-free system operations. Relevant system
considerations should cover functionality, suitability of materials to specific applications and numeric data. Correct installation, handling and maintenance of valves is the responsibility
of the systems designer and the user.
* STATE-L.G: LIQUEFIED GAS C.G: COMPRESSED GAS G:GAS
** SEAT MATERIALS - : VERY GOOD : GOOD : CAUTION X: POOR
UCV, Rev03, January 2010
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