HMC Diaphragm valve High Purity - HAM-LET FRANCE - #9

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313 ULTRA-CLEAN VALVES UCV SPECIFICATIONS Pressure Vacuum to 150 psi (10 bar) Operating Temperature: Standard 14 to140°F, -10 to 60°C (PCTFE Seat) Available 14 to 302°F, -10 to150°C *(Vespel® Seat) Leakage: Inboard Leakage 3x10-11 atm cc He/sec across the seat 1x10-9 atm cc He/sec Particle No particles detected above 0.1ìm. CV value 0.3 Surface Finish Ra (Ave)-Standard 5ìin Actuator Air Supply (Pneumatic) 60-90 psig , 4 - 6 bar Air Connection (Pneumatic) Thread 10-32 UNF HMSC COMPACT SURFACEMOUNT SERIES The Ultra Clean Series Valves offer a surface mount body design. The surface mount design complies with SEMI PR 3.1 for 1.112'' C-seal. This valve is a low profile body design with Integral Safety Lockout Tag-out (ISLT©) handle. (Pat. No. 165393). * Warning Select the right component for safety's sake: The total design of the system must be taken into consideration when selecting components in order to ensure that your HAM-LET products provide safe, trouble-free operation. It is the responsibility of the system designer and the user to consider the compatibility of the materials, of the components and system, the function of the component, appropriate ratings and to ensure proper installation, operation and maintenance. Improper selection or use of products can cause property damage or personal injury, in respect of which the system designer and/or the user shall be solely liable and responsible. n The dimensions apply to pneumatic and manual valves. n Dimensions are for reference only, and are subject to change. * Used with Viton® O-ring for actuation device Valve Status indication hole MATERIALS Item No. Part No. Material 1 Body Stainless steel, 316L Vim/Var 2 Seat PCTFE,Vespel® 3 Diaphragm Elgiloy® 4 Actuation Device Manual A6061T6 Pneumatic A6061T6 ACTUATION DEVICE - MARKING 4 3 2 4 1