Pressure Transducer - GEMS SENSORS & CONTROLS - #29

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Text version of the page
820 Series - Absolute
► Standard Torr, kPa and mbar Vacuum Ranges
► Wide Compensated Operating Temperature
► Protected Against Miswiring
The 820 Series sensor is an accurate, low-cost absolute sensor for even the most demanding vacuum applications. An all-welded construction eliminates stability issues inherent in other designs caused by frictional contact between dissimilar metals. 820 Series manometers are offered with a variety of vacuum pressure fittings, and a rugged design provides a high overpressure capability over a wide temperature range.
Common Specifications
Input
Pressure Range
0 to 1000 Torr or 0 to 100 kPa
Proof Pressure
See ordering chart
Burst Pressure
See ordering chart
Fatigue Life
>1 million cycles
Performance
Output
0-5 VDC or 0-10 VDC @ 6mA (3 wire)
Supply Voltage (Vs)
9-30 VDC (14-30 VDC for 10 VDC output)
Long Term Drift
±0.5% FS/year
Accuracy
±0.5% RDG
Thermal Error Zero
±0.01% FS/°F (±0.018% FS/°C)
Thermal Error Span
±0.015% RDG/°F (±0.027% RDG/°C)
Compensated Temperatures 32°F to +122°F (0°C to 50°C)
Operating Temperatures
-4°F to +176°F (-20°C to +80°C)
Storage Temperatures
-40°F to +257°F (-40°C to +125°C)
Zero Tolerance
.5% FS
Span Tolerance
.5% FS
Minimum Load Resistance
5000 ohms
Response Time
20 ms
Mechanical Configuration
Pressure Port
See ordering chart
Wetted Parts
Inconel® with Stainless Steel (4T fitting—All Inconel)
Electrical Connection
9-Pin D-Sub
Enclosure
All-Welded Stainless Steel
Shock
50g
Approvals
CE - 89/336/EEC for Heavy Industrial
Weight
5 oz
Applications
• Semiconductor Manufacturing
• Absorption Chillers
• Lasers
• Autoclaves
• Freeze Drying
• Vacuum Distillation
How They Operate
820 Series manometers feature an Inconel® diaphragm and insulated electrode, which forms a variable capacitor. As pressure (vacuum) increases or decreases, the capacitance changes. This capacitance is detected and converted to a fully-conditioned linear voltage output signal.
■o
70 m
70 m
-H
Conversion Chart
Torr x
1.333
=
mbar
Torr x
0.1333
kPa
Torr x
0.0193
=
psi
kPa x
10.0
T
mbar
kPa x
7.501
T
Torr
kPa x
0.145
=
psi
mbar x
0.10
=
kPa
mbar x
0.7501
=
Torr
mbar x
0.0145
=
psi
I/)
m
70
L2i

pageCatalog pdf di En 2012-05-22-29