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| | | GE Water & Process Technologies Analytical Instruments | | |
| | | Fact Sheet | | |
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| | | JICVCI o UPW Boron Analyzer | | |
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| | | Overview The revolutionary Sievers* UPW Boron Analyzer is the first on-line instrument to enable continuous, unattended monitoring of part-per-trillion levels of boron in deionized ultrapure water applications. GE Analytical Instruments has developed a patented UPW Boron Analyzer in cooperation with semiconductor manufacturers. This analyzer addresses the contamination control requirements of the latest generation fab technologies. It is designed specifically to meet the needs of facility managers, DI water engineers, and fab process engineers. On-line Performance Possessing the part-per-trillion sensitivity of ICP/MS,1 the Boron Analyzer ensures compliance with primary and polish loop boron specifications. At up to ten analyses per hour, facility managers can protect against upset conditions that would go undetected with ICP/MS or other laboratory analysis methods. | | |
| | | Evolution Driven by the contamination control needs in today's fabs and the cost savings associated with prolonged resin life, boron control is becoming the keystone of state-of-the-art water quality management programs worldwide. Only the Sievers brand UPW Boron Analyzer provides the | | |
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| | | means ment o | | significantly advance the quality and manage-ltrapure water ion exchange systems. | | |
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| | | Process Optimization Numerous published articles1-5 have identified boron as the best indication of mixed-bed ion exchange resin exhaustion, thus demonstrating the limitations of sole reliance on dissolved silica and conductivity monitoring. At the point of measurable increase in silica concentration, boron breakthrough has typically been underway for a prolonged period of time, causing significant exposure to processes that may be sensitive to boron. The Boron Analyzer was specifically designed to better predict mixed-bed exhaustion allowing the control of boron levels in the final polish UPW system. The analyzer is successfully being used to increase the lifetime of the polish loop mixed-bed ion exchange to save operational expenses.4 The instrument also plays an important role in optimizing power usage in EDI systems. It has also been demonstrated to provide the best control of the ion exchange system to prevent ionic silica from entering the polish loop.4 | | |
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| | | »• W4 l»* *J Boron Standard Concentration (ppb B) | | |
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