Sievers 500 RLe Brochure - GE Analytical Instruments - #1

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GE Power & Water Water & Process Technologies AnalytJcal Instruments Fact Sheet Sievers 500 RLe On-Line TOC Analyzer Advancing the science of ultra low levet SOC meosurement in microelectronics applications Overview The Sievers* 500 RL* OrvLine TOC Analyzer is Ihe semiconductor industiYs only on-line, reagenlless TOC analyzer capable of accurately detecting problematic compounds such as urcaP trimcthylamine fTMAj, organic acids and organic bases. An on-line Totol Organic Carbon (TOC) analyzer should be as simple as possible, but not so simple that it exposes the fabrication opérations to unacceptable risks associated with undetected organic transients. Recently the leading global semiconductor immersion tool manufacturer has required ail TOC measurements of the water feeding their tools to include the accurate meosurement of organic nitrogen compounds in the ultrapure water (UPWI.1 Sorne brands of TOC analyzers are simply not able to measure commonly présent organic nitrogen compounds such as urea of TMA in the UPW,1* The 500 RL* accurately and reproducibly measures them to meet this new TOC performance requircment, I he 500 RL* uses GE Analytical Instruments' proprietary membrane conductometric technology, delivering uttra low-level occurocy and reliability by eliminating false positive and false négative readings associated with other simplified TOC technologies (see Figures 1 and 2L The 500 RL# automatically exhibits the best-in-class Instrument-to-lnstrument matching and the lowest Limit of Détection (LOD) for reagentless online semiconductor UPW TOC analyzers. Five 500 RL* Analyzers were ploced on the same major semiconductor companies' 0.3 ppb C UPW and data was collccted for two months. The large data set showed that 91% of ail the Instrument-to-Instrument IOC readings were within ± 0,05 ppb C. Additionally 44.272 LOD analyses were performed on the same five analyzers, and 98% of the time the TOC LOD was less than 0.02 ppb C (see Figures 3 and 4L It is notable that this performance is achieved automatically without the need to do manual re-calibrât ion opérations or to send the analyzer offsite for spécial calibrations, as often required by other TOC sensors. Design enhancements altow the 500 RL* to operate on higher conductivity waters than the PPT while still delivering the same analytical performance. As a resuit, the 500 RL* offers greater versatility and reliability. Spécifie attention has been paid to performance on low dissolved oxygen (DO| water Systems, resolving IOC recovery issues that are problematic for other reagentless TOC analyzers. Applications Microelectronics Ultrapure Process Waters The 500 RL* Analyzer's remorkoblc Irtstrument-to-lnstrument matching allows you to confidently compare TOC results between différent water loops in your factory and around the world. The very high sensitivity. as demonstrated by the LOD, allows you to see the smallest change in your System before it gets out of control. For the most odvanced state of the art chip manufacturing facilities' requirements. there is never a question about unmeasured organics that moy be