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Text version of the page
| FRTFries Research S Technology | ||||||||||||||||
| Unique, Non-Contact, | ||||||||||||||||
| Measurement of | ||||||||||||||||
| roughness step height profile contour pitch trench bumps topography totalthickness variation (TTV) bow, warp coplanarity parallelism angle critical dimensions (CD) | ||||||||||||||||
| MicroProf® TTV ■ totalthicknessvariation ■ page6 | ||||||||||||||||
| MicroProf® ■ roughness,profile,filmthickness,topography ■ page4 | ||||||||||||||||
| the art of metrology™ | ||||||||||||||||