Brochure - FRT, Fries Research & Technology - #19

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High-Speed Thickness Measurement p
thickness measurement using infrared light
high resolution and accuracy
suited forwafermeasurement
up to five times fasterthan white light measurement
up to ten times greater measuring range (up to 3.5 mm)
Thin Layer Sensor
^ ForSemiconductorand High-Tech Products
spectrally resolved reflection measurement
multi-layermeasurement of separate layers with nanometerresolution comprehensive database with parameters of semiconductors, oxides, etc. compilation of recipes for every measuringtask thickness mappingwith MicroProf® and MicroGlider®
Technical Specifications
measuring principle
reflectrometry
light source
halogen lamp
deuterium halogen lamp
model
VIS
NIR
VIS/NIR
UV/VIS
UV/VIS/NIR
wavelength range
400 nm ... 850 nm
650 nm ... 1100 nm
400 nm ... 1100 nm
250 nm ... 850 nm
250 nm ... 1100 nm
measuring range thickness
50 nm ... 20 urn
70 nm ... 70 um
50 nm ... 100 um*
10 nm ... 20 um
10 nm ... 70 um
resolution layerthickness
1 nm
resolution x,y
200 um ... 800 um without optics (better than 10 um with additional optics)
optionally 1 um ... 250 um.
^ Discoverthe Microcosm
The atomic force microscope (AFM) is a highly sensitive probe head that utilizes a piezo-scannerwith very high resolution. This enables you to reach far into the sub-nm-range. Besides surface topography measurement, various available measuring modes enable the determination of many different surface properties. The base configuration features the contact measuring mode. Due to the multi-sensorcapability of the MicroProf® and MicroGlider® systems, the AFM sensorcan be used in combination with the optical sensors and therefore the measuring range can be extended from a few um up to 600 mm.
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contact mode non-contact mode magnetic/electrostatic force elasticity mode friction/lateral force mode Kelvin probe mode liquid compatible
AFM measurement on a biological sample
oxide filmona wafer surface
Technical Specifications
measuring principle
atomic force microscopy (AFM)
measuring range x,y
20 umx20 um 40umx40um 80umx80um
measuring range z
min. 2 um min. 4 um min. 6 um
detection principle
fiber-optic interferometer
resolution x,y
typ. 5 nm
resolution z
typ. 2 nm
scan speed
1-5 lines/s
J
measurement of blood cells
the art of metrology™
++ research and development +++ incoming goods inspection +++ process optimization +++ production control +++ quality assurance +++ failure analysis ++-

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