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| | | ^ High-Speed Thickness Measurement p | | |
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| | | thickness measurement using infrared light high resolution and accuracy suited forwafermeasurement up to five times fasterthan white light measurement up to ten times greater measuring range (up to 3.5 mm) | | |
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| | | Thin Layer Sensor | | ^ ForSemiconductorand High-Tech Products | | |
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| | | spectrally resolved reflection measurement multi-layermeasurement of separate layers with nanometerresolution comprehensive database with parameters of semiconductors, oxides, etc. compilation of recipes for every measuringtask thickness mappingwith MicroProf® and MicroGlider® | | |
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| | | Technical Specifications | | |
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| | | | | | | | | | | | | | measuring principle | | | reflectrometry | | | | | light source | halogen lamp | deuterium halogen lamp | | | | model | VIS | NIR | VIS/NIR | UV/VIS | UV/VIS/NIR | | | | wavelength range | 400 nm ... 850 nm | 650 nm ... 1100 nm | 400 nm ... 1100 nm | 250 nm ... 850 nm | 250 nm ... 1100 nm | | | | measuring range thickness | 50 nm ... 20 urn | 70 nm ... 70 um | 50 nm ... 100 um* | 10 nm ... 20 um | 10 nm ... 70 um | | | | resolution layerthickness | 1 nm | | | | resolution x,y | 200 um ... 800 um without optics (better than 10 um with additional optics) | | | | | | | | | | | | | |
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| | | optionally 1 um ... 250 um. | | |
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| | | ^ Discoverthe Microcosm | | |
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| | | The atomic force microscope (AFM) is a highly sensitive probe head that utilizes a piezo-scannerwith very high resolution. This enables you to reach far into the sub-nm-range. Besides surface topography measurement, various available measuring modes enable the determination of many different surface properties. The base configuration features the contact measuring mode. Due to the multi-sensorcapability of the MicroProf® and MicroGlider® systems, the AFM sensorcan be used in combination with the optical sensors and therefore the measuring range can be extended from a few um up to 600 mm. | | |
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| | | «Aie,Lsiui.tJAi.ue=a | | |
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| | | contact mode non-contact mode magnetic/electrostatic force elasticity mode friction/lateral force mode Kelvin probe mode liquid compatible | | |
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| | | AFM measurement on a biological sample | | |
| | | oxide filmona wafer surface | | |
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| | | Technical Specifications | | |
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| | | | | | | | | | measuring principle | atomic force microscopy (AFM) | | | | measuring range x,y | 20 umx20 um 40umx40um 80umx80um | | | | measuring range z | min. 2 um min. 4 um min. 6 um | | | | detection principle | fiber-optic interferometer | | | | resolution x,y | typ. 5 nm | | | | resolution z | typ. 2 nm | | | | scan speed | 1-5 lines/s | | | | J | | | | | | | | | |
| | | measurement of blood cells | | |
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| | | the art of metrology™ | | |
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| | | ++ research and development +++ incoming goods inspection +++ process optimization +++ production control +++ quality assurance +++ failure analysis ++- | | |
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