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PRODUCT DATA

Plus

TCU 40/80 Temperature Control Unit The TCU 40/80 Plus is a single channel temperature control unitwhich offers enhanced heat load capacity,making the unit ideal for the cooling of wafers during 300mm etch as well as other advanced semiconductor manufacturing processes.The system is designed for high reliability,up-time performance,and ease of maintenance,pro- viding continuous trouble-free operation across wide temperature extremes for reduced cost of ownership.This,combined with the BOC Edwards global service support organization,makes the TCU 40/80 Plus the new industry standard.

Features & Benefits

?Magnetically driven coolant pump for leak free,reliable operation?Wide operating temperature of -40°to +80°C?Temperature set at 0.1°C increments?Typical stability +/- 1°C?Adjustable coolant flow rate 1-6 gpm?SEMI S2-93 qualified & CE marked?Perfluorocarbon coolant for ion free operation?Remote temperature sensing capability?Stainless steel pressurized coolant system?MTBF of 50,000+ hours?Refrigerant & coolant lines are helium leak checked?BOC Edwards worldwide service support

BOC EDWARDS

www.bocedwards.com