DSM - Piezoelectric Positioning Systems - DSM - #5

To satisfy a customer's request for a compact, custom two-axis positioning system, DSM leveraged the flexure-based design of its flextensional piezo actuators to create linear independent X and Y stages that provide 200 microns of travel The stage system was designed for vacuum compatibility. The design of the stages is scaleable to smaller/larger displacement capabilities.

As a follow-on deliverable to the original open-loop XY system, this customer requested closed-loop control capability over 140 microns for X and Y axes (see picture at side). DSM incorporated capacitive probes and used the SA linear servo amplifier to provide stand-alone servo control.

The SA servo amplifier features a 24-bit analog input, which accepts the position target signal, and digital I/O provide flags for "in-range" and data acquisition triggers. In addition, serial (RS-232) communication with the SA enables remote access and control of the amplifier's features.

• Flexure-based, solid state piezoelectric actuation for stiction-free and backlash-free operation

• Configured for closed loop control with incorporated capacitive sensors

• 2nm,rms demonstrated motion resolution

• Vacuum compatible construction and design

• Stroke:

• Unloaded Resonant Frequency:

• Servo Positioning Resolution

• Dimensions:

140 urn ± 10% 590 Hz ± 5%

2nm, rms

60 x 70 x 12.5 mm

Linear micropositioning and nanopositioning stages based on DSM's standard FPA actuator architecture can be configured for up to 2mm displacement ranges.

A variety of displacement sensors can be incorporated into the linear stage designs in order to achieve performance and cost trade-offs that best match an application's specific performance requirements.

DSM has extensive experience in custom actuator design for specialized force or stroke requirements. Contact us about your specific actuator needs.