Catalogues - surfcom - carl-zeiss-industrielle-messtechnik

Catalogue Surfcom

www.zeiss.de/imt

Page

/ 16

Make a request

CARL ZEISS Industrielle Messtechnik - 2633

/ 16

See other catalogues for CARL ZEISS Industrielle Messtechnik

Text version of the page

Contour & roughness

Surfcom 5000

Combined contour and surface measurements for high-end applications. Technology for the highest demands.

Highest class of accuracy

Contour and surface measurements in one

step

Laser interferometric stylus-and-arm system

with a resolution of 0.31 nm

New design eliminates environmental

influences

Friction-free, patented linear motor technology in the tracer driver Extremely high measuring and travel speeds (X = 60 mm/s, Z = 200 mm/s) reduce measuring times

Cylindrical stylus-and-arm system permits high flexibility- even for complex applications Upgradeable to full CNC version with customer-specific table modules Topography measurements to analyze 3D surface data

Surfcom 5000 -

the high-end contour and surface measuring instrument

Surfcom 5000 stylus-and-arm system for a measuring range of 13 mm


	Performance data for Surfcom 5000
	Measuring range/resolution	X = 200 mm Z = 13 mm with standard stylus length Z = 26 mm with doubled stylus length
	Measuring speed	Roughness max. 3 mm/s Contour/waviness max. 20 mm/s
	Travel speed	X = 60 mm/s, z = 200 mm/s
	Measuring accuracy	X = ± (0.2 + L/1000) pm, L = Measuring length in mm, Z = ± (0.2 + H/1000) pm, H = Measuring length in mm
	Straightness accuracy	X = 0.05 + 3 L/10000) pm, L = Measuring length in mm
	Data point density per measurement	max. 150,000

Resolution

X = 0.54 nm, Z = 0.31 nm