Kinematics Highly accurate, air-bearing kinematics consisting of hard stone and carat technology
F25 description with linear drives and base with active air damping Measuring systems Ultra-precise, incremental length measuring systems with glass-ceramic scales in all machine axes with a resolution of 0.25 nm Contact sensor system (SSP) Small Silicon Probe based on solid state joint kinematics Optical sensor system Camera system for image analysisS/W CCDcamera (based on ViSCAN)IlluminationReflected light LED ring (green 532 nm)Transmitted lightlight table whiteOptical system10x (20x optional) total magnification comprising: tube extension and 5x highly accurate lens, 45 mm (54.5 mm, 10x) working distanceObservation cameraTo visualize the work environment of the contact sensor (SSP)
Printed in GermanyDBD-TS-IX/2007 Uoo Subject to change in design and scope of delivery and as a result of ongoing technical development. Printed on chlorine-free bleached paper.© Carl Zeiss. F25 measuring ranges, dimensions, weight Measuring range ContactOpticalTactile and opticalX [mm]13013088 Y [mm]13013088
60-20-126/III-e Z [mm]10010074 Dimensions (W x H x D)approx. 1650 x 1450 x 2000 Max. workpiece weight up to 5 kg F25 weight 600 kg Weight of base 150 kg
F 25 accuracy Solid state joint stylus Linear measuring tolerance MPE complies with DIN EN ISO 10360-2for E (µm) at 19.5 – 20.5 °C (67.7 – 68.9 °F) 0.25 + L*/666 *L = measuring length in mm Probing tolerance MPE complies with DIN EN ISO 10360-2for P (µm) 0.3 ViScan (optical image analysis) Probing toleranceR
2 (µm) 0.6 total magnification 10x Complies with VDI/VDE 2617-6R
2 (µm) 0.5 total magnification 20x (optional) Acceleration 300 mm/s
2 per axis Travel speed 20 mm/s per axis
F 25 ambient conditions Humidity 40% to 60% Ambient temperature for operational readiness +15 °C to +30 °C Temperature conditions to guarantee specifications Complies with measuring lab class 1 in accordance with VDI/VDE 2627 Ambient temperature20 °C (68 °F) ± 0.5 KTemperature gradient0.2 K/h 0.4 K/d 0.1 K/m Carl ZeissIndustrielle Messtechnik GmbH 73446 OberkochenGermanyContact: Karl Seitz Tel.: ++49 (0)73 64 20 4326 Email: seitz@zeiss.de Internet: www.zeiss.com/imt