Contact scanning sensor A 6.5 x 6.5 mm contact, passive measuringstylus consisting of a silicon chip membrane and integrated piezo-resistive elements was developed based on solid state joint kinemat- ics. This stylus permits measurements in both single point and scanning mode. The 3D micro-stylus is designed for stylus diameters of 50 – 500 micrometers and stylus tip diameters of 100 – 700 micrometers. With a free shaft length of up to 4 mm, it is possible to measure in small, deep-lying structures with probe forces of less than 0.5 mN/µm.
Optical sensor The ViScan camera sensor from the standard program, combined with an objective lens based on those used in Zeiss microscopy, is used as an optical sensor for 2D measure- ments. These optics, which have been opti- mized for depth of field and have minimized distortion, ensure accurate measuring results with maximum resolution in reflected and transmitted light.
Multi-sensor system The combination of contact and optical sen- sors enables measurements of 2D and 3D structures in the same coordinate system. An additional camera aids visualization when probing the miniaturized features, thus simpli- fying part programming.
Software Time-tested CALYPSO from Carl Zeiss enables you to evaluate captured data using standard measuring software with an intelligent user interface that can also be used on all other coordinate measuring machines.
Range of applications Rotationally symmetrical parts with free-form surfaces, small radii, undercuts Prismatic parts with small and deep bores Flat metal parts with low form stability 2D parts with bores and cut-outs