NS50/NS50L instrumentation booklet - CAMECA - #9

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Analyzer Transmission versus Mass Resolution
MRP
T (%)
3500
100
5910
68
6120
65
6770
56
7120
51
7390
45
7885
39.9
9470
29
9615
24.5
100 90
C 80
o
CO CO
70
60
CO
CO
50
40
CD
'-4—>
_co
CD
a:
30
20
Without any slit, mass resolution is 3500 and transmission is taken as 100%. Other transmissions are referred to this one.
10
0
2000 3000 4000 5000 6000 7000 8000 9000 10000
Mass Revolving Power
Mass resolution is taken as M/dM = R/4 * L10-90, where R is trajectory radius and L10-90 is line width corresponding to 80 % of intensity
Optimized for lateral resolution and sensitivity, the NanoSIMS is a pure ion Microprobe (scanned focused ion beam) and has no ion microscope mode (transport of a stigmatic, magnified mass filtered ion image) as on the CAMECA IMS analyzers.
One of the characteristics of the NanoSIMS is to work in high mass resolution: by design, there is no low mass resolution mode on the NanoSIMS, even when removing all apertures.
In addition, the analyzer transmission is maintained very high (see plot above), even when increasing the Mass Resolution. This is the result of:
- a very high, normal extraction field allowing a very early secondary ion focusing,
- a limited field of view together with a dynamic emittance matching,
- a careful transport and rectangular shaping of the secondary beam resulting in the use of small slit compared to the magnet size, reducing aberrations,
- the correction of the second order mass spectrometer optical aberrations.

pageCatalog pdf di En 2012-05-22-28