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Proven results in the analysis of metallic alloys,magnetic materials, nanowires... as well as advanced materials for semiconductors: silicides, oxide layers...

LAWATAP analysis of a TbCo2/Fe magnetostrictive multilayer:

Fe TbCo

2

Thanks to the unique in-depthresolution of the LA-WATAP, the three-dimensional reconstruction of the layers allows the analysis of the interfaces. The concentration profile along thedepth clearly reveals differences between the interfaces: the Fe-on- TbCo2 (1nm thick) interface is thinner than the TbCo2-on-Fe interface (4nm thick). This effect is attributed to Fe/Co interdiffusion, controlled by the establishment of the Tb layer (Tb layer acts as a diffusion barrier for Fe and Co atoms). Fe layers are well crystallized.

•

Tb

•

Co

12nm

•

Fe

Concentration depth profile 3D reconstructionSEM image of the sample prepared as a tip by FIB (Focused Ion Beam)

Courtesy of Rouen University, France. Concentration (at%) Depth (nm) CAMECA is the reference in micro- and nano-analysis, providing cutting-edge science and metrology solutions with unequaled customer support through a worldwide network of subsidiaries and agents. Corporate headquarters:CAMECA • 29 Quai des Grésillons • 92622 Gennevilliers Cedex • FRANCETel : +33 (0)1 43 34 62 00 • Fax : +33 (0)1 43 34 63 50 • gennev@cameca.com Subsidiaries:CAMECAGermany • sales.germany@cameca.com CAMECAInstruments Inc., USA • sales.usa@cameca.com CAMECAInstruments Japan KK • sales.japan@cameca.com CAMECAKorea Co. Ltd. • sales.korea@cameca.com CAMECATaiwan Corp. Ltd. • sales.taiwan@cameca.com

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LA-WATAP

LA-WATAP Sep 2008. Non-contractual document. CAMECA reserves the right to alter the specifications of its products without notice.All mentioned trademarks are registered by their respective owners.