Incident angle variation on the CAMECA IMS 7f - CAMECA - (Version JPG) - PDF Catalogue | Technical Documentation

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Mass spectrometer, Measuring device, Scanning probe microscope, Secondary ion mass spectrometer, Microscope

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IMS 7f

'inicol note

1« CAMECA

SCIENCE & METROLOGY SOLUTIONS

Incidence Angle

A more accurate computation of incidence angle values can be performed by taking into account this effect. Values for 9 and 9' for different Vs and Vp configurations are reported in Table 1.

For the CAMECA IMS 7f, according to the geometry of the primary column and the secondary ions extraction system (Fig. 1), the primary beam incidence angle can be computed, in first approximation, from the relationship :

sin(a = 30°)

Table 1: Comparison between 6 and 6' values for different Vs and Vp configurations

sinG =


\|— Accelarating voltage —\| V_p (kV) V_s (kV)		9 a(=30°)	9' a'
+8	+5	55	52
+5	+3	52	50
+3	+2	60	56
+1.15	+0.9	90	81
+2	-0.6	26	26

where V_s and Vp stands for the secondary and primary accelerating voltage, respectively.


	Fig.l: Primary column and secondary ions extraction system configuration of the CAMECA IMS 7f.
	Primary column axis
	x Double deflector
	\\V	. Secondary ion optics axis
	\ a'	Immersion lens 1 9'
		9

The diagram plotted in Fig. 2 shows the variation of 6' as a function of the primary ion source extraction voltage for different positive secondary voltages. IHIII

The CAMECA IMS 7f offers a rather large flexibility for the incident angle setting at different impact energies (Table 2).

It must be noted that the double deflector of the primary column used to bring back the primary spot onto the axis of the mass spectrometer makes the primary beam entering in the secondary ion extraction space with an angle a' different from a(=30°).

Incident angle variation on the CAMECA IMS 7f - CAMECA - #1

Mass spectrometer, Measuring device, Scanning probe microscope, Secondary ion mass spectrometer, Microscope