SVG Track Systems - C&D Semiconductor Services Inc - #1

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Smart Solutions for the Semiconductor Industry C&D Semiconductor Services, Inc. • 2210 Lundy Avenue, San Jose, CA 95131 • Tel 408.383.1888 • Fax 408.383.1889 • www.cdsemi.com Coat – Developer - Scrubber The SVG 8X systems have been used in production since the early 1980s. They have been proven to be a true “work horse”. The process modules are easily removed for troubleshooting or preventive maintenance. System cabinets can be built large enough to make room for future modules. C&D remanufactures, refurbishes, and rebuilds all 8X SVG linear track systems. C&D can refurbish or rebuild track systems to SVG original specifications or reconfigure existing tracks with C&D’s innovative upgrades. The SVG 86X belt transfer system works well for square or rectangular substrates while the SVG 88X transfer arms provide minimal contact with the backside of the wafer. SVG 86X can run 2” – 6 substrates and the SVG 88X can run 2” – 8” substrates. Clean dispense line tips•• Dual size bridging without ••hardware changeover on 88X Recipe Master•• Upgraded ATS arms for ••repeatability Low Turbulence Catch Cup•• 88X systems for 2” – 8” wafers•• Square substrates on 86X ••systems CE Mark•• High performance motors•• for improved uniformity and reliability Sub micron capability•• Digital Vacuum Switches•• Flood Expose •• AutoCAD layout drawings•• SYSTEM FEATURES SVG Tracks consistently operate at 95% uptime. Their proven design and ease of maintenance keeps the cost of ownership very low. For greater than 20 years, this platform continues for be used at Universities, R&D companies, and small and large wafer Fabs alike. SVG 8X Track Systems Reliable and Cost Effective