Catalogue System Catalog MFC and Proportional Valves
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3.3.
Communication with the Mass Flow Communicator software (see Section 4 for further information) is via the RS-232 or RS-485 (depending on the instrument).
In addition to reduced drift and offset by the components, microprocessor-based digital electronics offer the major advantage that all the required pro­cesses can be controlled by software (flash-programmed, in other words, the electronics can be updated). Data rele­vant to this (calibration curves, correc­tion functions, control functions, etc.) can be stored in the memory.
The "valve authority" is important for the MFC control properties in the sy­stem. It should not be below a value of 0.3 ... 0.5.
Meaning of formula symbols:
kVa Flow-rate coefficient of sy­stem without installed MFC in m3/h
kVs Flow-rate coefficient of the MFC with final control ele­ment fully open in m3/h
(Ap)0 Pressure drop through the entire system
(Ap)V0 Proportion of this that drops through the MFC with the valve fully open.
The system section should not be designed in terms of its flow-rate coefficient kVa, so that at the required nominal flow rate, the vast majority of the available pressure is used there and thus the selected nominal valve diameter is too large. In this case, the valve authority is too small, in other words, only a small proportion of the valve working range is used. This con­siderably impairs the resolution and control quality of the MFC. If the sy­stem section is designed to be too "small", increasing the nominal valve diameter will not help, and the remedy is either to increase the supply pres­sure or increase the kVa value, e.g. by means of a larger pipe diameter.
Proportional industrial solenoid valve acting as final control element in a mass flow controller
Direct-acting plunger-type proportional valves (see Section 9, Proportional valves) from the Burkert valve range are used as final control elements in all MFC series. Constructive measures, in particular on valves in the MFCs for low flow rates (Types 8710 and 8712), ensure that the moving plunger is guided with low friction. Together with the PWM actuation, this ensures a constant, almost linear characteristic curve along with high response sen­sitivity. Both of these features are important for optimal function in the MFC's closed control loop. The nomi­nal diameters of the valves result from the required nominal flow rate Qnom, the pressure conditions in the appli­cation and the density of the operat­ing gas. Using these data, a propor­tional valve can be selected whose flow-rate coefficient kVs allows the maximum flow of at least the required nominal flow rate in the specified pressure conditions and in compliance with the flow-rate equations:
w, x, y2 [%]
Setrpoint va[ue. W
100 90 80 70 60 50 40 30 20
10 0
>■ Time [s]
0
0,2 0,4 0,6 0,8 1,0
Figure 10: Step response of Type 8712 Mass Flow Controller after a set-point step from 10 % to 95 %
w, x, y2 [%]
_Setrpoint_y%Ju.e w.
f' vo
100 90 80 70 60 50 40 30 20 10 0
(Ap)o [kva2 + kvs2]
> Time [s]
0 0,2 0,4 0,6 0,8 1,0
Figure 11: Step response of Type 8626 Mass Flow Controller after a set-point step from 10 % to 95 %
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