NEMA 4X and IP66 Mass Flow Controllers and Meters - Brooks Instrument - #1

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1 Brooks® Mf Series Data Sheet DS-TMF-Mfi-Mfx-MFC-eng August, 2009 SPECIFICATIONS Performance Characteristics: Table 1 Flow Ranges * Standard temperature and pressure equals 0°C and 101kPa (760 Torr). These mass flow controllers and meters can be calibrated to other conditions. Specify at time of ordering. ** Refer to Table 2 for standard flow ranges which are based on the meter/pipe size from 1-1/2 inches through 8 inches. Control/Usable Range 50 to 1 Accuracy ±1% full scale including linearity at calibrated conditions ±1.5% full scale including linearity for Mf50 and Mf60 for flow ranges greater than 20 slpm Repeatability 0.25% of rate Sensitivity to Mounting Attitude ±0.5% full scale maximum deviation from specified accuracy after re-zeroing under 200 psig. Specify mounting attitude at time of order to insure optimum performance. Mfi Series Controllers: Mf50i, Mf51i and Mf53i Meters: Mf60i, Mf61i and Mf63i Mfx Series Controllers: Mf50x, Mf51x and Mf53x Meters: Mf60x, Mf61x and Mf63x • NEMA 4X, IP66 watertight construction • UL and cUL listed and recognized for Class I Division 2 hazardous locations (Mfx) • Wide FS flow range for measurement and control of gases from 3 sccm to 1000 slpm N2 (control) and 1000 slpm N2 (measurement) • Flow control to 1000 slpm N2 • Flow metering to 1000 slpm N2 • Sensor: Removable (Mfi) / Welded (Mfx) • Insensitive to mounting attitude • Selectable response time • Electrically activated valve override • Low command flow cutoff • Corrosion resistant valve DESCRIPTION The Brooks® Mf Series mass flow controllers and flowmeters are specifically designed to be used in an industrial environment. These controllers and meters offer high accuracy, control and measurement of industrial gases with the added integrity of NEMA 4X, IP66 industrial packaging. Additionally, the Mfx Series offers Class I Division 2 hazardous location approval. The heart of the controller and meter is the removable flow sensor which produces an electrical output signal linear with mass flow rate. This output can be used for indicating, recording and/or control purposes. The Brooks Mf Series Mass Flow Controller has an integral valve and accepts a remote setpoint which makes it a simple and easy to install flow control system. Many options are offered to provide a versatile system of mass flow control and measurement. The control circuitry compares the command setpoint to the flow signal and positions the precision solenoid control valve. When the command signal is below 1% of full scale, the control valve is positioned to fully closed. The control valve can be latched fully open or closed by activating the valve override circuit. NEMA 4X and IP66 Mass Flow Controllers and Meters Mf61 Mass Flowmeter Mf50 Mass Flow Controller Mass Flow Mass Flow Flow Ranges PED Controller Meter Nitrogen* Module H Model Model Min. F. S. Max. F. S. Max. Press. (slpm) psi (Bar) Mf50 Mf60 0.003 30 1500 (100) SEP N/A Mf60 0.003 30 4500 (300) Mf51 Mf63 10 100 1000 (68) Mf53 N/A 100 1000 1000 (68) 1 for all 150 lbs.Flanges