Model 5964D High Performance Metal Sealed Mass Flow Controller - Brooks Instrument - (Version JPG) - Page n° 4 - PDF Catalogue | Technical Documentation

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Magnetic level indicator, Bourdon tube pressure gauge, Valve, Digital controller, Liquid flow-meter

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4 Data Sheet DS-TMF-5964-MFC-eng October, 2008 High Performance Metal Sealed MFC Figure 4 Model 5964D Card Edge Dimensions with VCR Figure 5 Model 5964D Card Edge Downport Dimensions

Model 5964D High Performance Metal Sealed Mass Flow Controller - Brooks Instrument - #4

Magnetic level indicator, Bourdon tube pressure gauge, Valve, Digital controller, Liquid flow-meter