Data Sheet
DS-TMF-5853E-5863E-MFC-eng
October, 2008 Model 5853E & 5863E
Mass Flow Controller & Meter
Models 5853E/5863E
Features & Benefits
• Easy maintenance
• Fast flow response to command changes
• Negligible flow overshoot/undershoot
• Removable sensor
• Insensitive to mounting attitude
• Wide flow range (up to 1000 slpm N2)
• End accessible zero and span potentiometers
Model 5853E:
• Jumper selectable external valve control
• Electrically activated valve override
• Low command flow cutoff
• Normally closed valve
• Meriam® LFE restrictor
• Bellows sealed high stability valve
• Wide range of pressures and pressure drops
Description
The Brooks® Models 5853E/5863E Mass Flow
Controller and Meter accurately measure and control
gas flow (5863E Meter only). The heart of the system
is its removable, attitude-insensitive sensor which
produces an electrical output signal linear with flow
rate used for indicating, recording, and/or control
purposes. It eliminates the need for continuous
monitoring and readjustment of gas pressures to
provide a stable gas flow.
Principle of Operation
The operating principle of the Brooks
mass flow controller
and meter is thermodynamic. A wire wound heating
element directs heat to the midpoint of the bypass sensor
tube. A predetermined portion of the total flow is diverted
through the bypass sensor tube. On the same tube,
equidistant upstream and downstream of the heat input,
are resistance temperature measuring elements.
With no flow, the heat reaching each temperature element
is equal. With increasing flow, the flow stream carries
heat away from the upstream element, T1, and an
increasing amount towards the downstream element, T2.
An increasing temperature difference develops between
the two elements and this difference is proportional to
the amount of gas flowing or the mass flow rate. A bridge
circuit interprets the temperature difference and an
amplifier provides a 0-5 Vdc output signal.
Figure 1 Principle of Operation
The control circuitry compares the command setpoint to
the flow signal and positions the precision solenoid
control valve (Model 5853E) to maintain the desired flow
rate. When the command signal is below 2% of full scale,
the control valve is positioned to fully closed. The control
valve can be latched fully open or closed by activating
the valve override circuit (Model 5853E).
Specifications
Performance:
Flow Ranges
Any full scale flow from 0 - 100 slpm* to 0 - 1,000 slpm
(Nitrogen equivalent).
*Standard pressure and temperature in accordance with SEMI
(Semiconductor Equipment and Materials Institute) standard: 0°C
and 101 kPa (760 Torr). The
mass flow controller can be calibrated
to other reference standard conditions. Specify at time of ordering.
Control / Usable Range
50 to 1
Accuracy
±1% full scale including linearity at calibrated conditions.
+ Vdc
Flow
Amplifier
Heater
0-5 Vdc
Bypass
Sensor Tube
T2
Downstream
Temperature
Sensor
To Power Supply
T1
Upstream
Temperature
Sensor
Bridge
for
ÄT Detection
Model 5863E
with D-Type Connector
and Flange Fittings
Model 5853E
with D-Type Connector
and Compression Fittings
