Mass Flow Controller & Meter Models 5853E/5863E - Brooks Instrument - #4

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Data Sheet DS-TMF-5853E-5863E-MFC-eng Model 5853E & 5863E October, 2008 Model 5863E with Fittings Model 5863E with Flanges CONNECTION TYPE "X" DIMENSION inch mm Female Pipe Thread 6.1 155 1/2" Tube Compression* 8.8 223 3/4" Tube Compression* 8.8 223 1" Tube Compression* 9.1 232 1/2" VCO ** (100 slpm max.) 8.1 206 3/4" VCO * 8.4 213 1/2" VCR ** (100 slpm max.) 8.3 211 1/2" VCR* 10.2 259 * 1 1/16 - 12 UNF Connection To Body ** 9/16 - 18 UNF Connection To Body PIN NO. FUNCTION COLOR CODE 1 Not Used Black 2 0-5 Volt Signal Output White 3 Supply Common Red 4 Not Used Green 5 +15 Vdc Supply Orange 6 -15 Vdc Supply Blue 7 Not Used Wht/Blk 8 Not Used Red/Blk 9 Supply Voltage Common Grn/Blk 10 0-5 Volt Signal Common Org/Blk 11 +5 Volt Reference Output (Command Pot "CW") Blu/Blk 12 Not Used Blk/Wht 13 Not Used Red/Wht 14 Chassis Ground Grn/Wht 15 Not Used Blu/Wht *Factory Activated Option PIN OUT - TOP VIEW Note: 1. Cable shield tied to chassis ground in meter connector. Make no connection on customer end. 2. All power leads must be connected to power supply. 1 9 15 8 Specifications Subject to Change Without Notice Flange Flange OD, "D" Type inch mm ANSI 1/2" 150 lb 3-1/2 89 ANSI 1/2" 300 lb 3-3/4 95 ANSI 1.0" 150 lb 4-1/4 108 ANSI 1.0" 300lb 4-7/8 124 ANSI 1.5" 150 lb 5 127 ANSI 1.5" 300 lb 6-1/8 156 ANSI 2.0" 150 lb 6 152 ANSI 2.0" 300 lb 6-1/2 165 DIN DN15 PN40 3.74 95 DIN DN25 PN40 4.53 115 DIN DN40 PN40 5.90 150 DIN DN50 PN40 6.50 165 Figure 6 Model 5863E Dimensions Figure 7 Model 5863E Pin Out