GF100 Mass Flow Controllers - Brooks Instrument - #1

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GF100 Mass Flow Controllers High purity digital mass flow controller »1% digital set point accuracy and <1 second response time »Multi-gas /multi-range user configurability for optimum process flexibility and reduced inventory investment »Independent service port for data-logging and process development High Performance Flow Control The Brooks Instrument GF100 is a robust upgrade for standard high purity (HP) mass flow controllers, offering improved accuracy and cleanliness. Optional electrical adapters ensure drop in compatibility with older style analog flow controllers. Brooks’ new sensor technology with improved signal to noise performance and powerful control algorithms deliver enhanced measurement accuracy and reproducibility for optimal gas chemistry control. The GF100 is designed for long-term reliability with embedded diagnostics and automated zeroing to reduce maintenance for a lower cost of ownership. Standard Features • High purity construction with reduced surface area and removal of unswept volumes for faster dry-down during purge - Surface passivated high purity wetted flow path - 10 ì inch Ra surface finish • Independent service and diagnostic port for on-tool troubleshooting and process fingerprinting and optimization • Integrated high visibility LCD display reports flow (%) and temperature (°C) • Analog and Serial (RS-485), analog 0–5 VDC and DeviceNet™ communication interfaces • Gas and range user configurable - Multi gas/multi range model created and proven using actual process gases to ensure real world accuracy - Change full scale flow range up to 3:1 for optimum process and inventory management flexibility - Select from hundreds of gases and gas mixtures Applications • Thin-film solar deposition and etch • c-Si deposition • Wear resistant surface coatings • Physical vapor deposition • MEMS manufacturing • Fiber optic and glass coating • Bioreactor gas management • Flame control • Gas blending