GF100 Mass Flow Controllers - Brooks Instrument - #4

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©2009 Brooks Instrument, LLC 153-30648-000 Rev 001 (08/09) For technical assistance, contact Brooks Instrument Applications Engineering at 972.359.4000. 3.278 5.000 4.882 1.207 .184 1.500 IN SERIES SEMATECH 1.504 38.2 mm .732 18.6 mm 2X M4 X 0.7-6H 1.000 25.4 mm 45° 2X M5 X 0.8-6H 4.450 1.500 1.207 5.000 3.666 4.882 ANALOG DEVICENET NOTE: Please contact Brooks Instrument product management for other configuration options. All dimensions in inches unless otherwise stated. Multiple standards exist for mounting hole locations which will vary between manufacturers and model generations. Contact Brooks Product Mgmt for help with your application. Example: GF100 C XX C SH40 010C VX A O *DX XXXX A A 000 VX CX DX WX YX AX BX LX A V DX EX GX G1 KX BB XXXX ===> SH40 SH41 SH42 SH43 SH44 SH45 SH46 SH47 SH48 ===> 010C 030C 092C 280C 860C 2.6L 7.2L 015L 030L GF100 Configurable Gas Specific Flow Ranges from 3 sccm–30 slpm N2 Equivalent Standard Application Normally Closed Valve 1-1/2" VCR 1/4" 1-1/8" C Seal 92mm 1-1/8" C Seal 80mm 1-1/8" W Seal 92mm 1-1/8 W Seal 80mm 1-1/2" C Seal 92mm 1-1/2" W Seal 92mm 1-1/8" C Seal 92mm w/Poke Yoke Atmosphere Vacuum Auto Shut Off (Included) Auto Shut Off (Not Included) Customer Special Request Number Standard Flow Sensor Specify Gas Code and Range, i.e. “0004” = Argon and “010L” = 10 slpm Standard Configuration # 40, 3–10 sccm N2 Equivalent Standard Configuration # 41, 11–30 sccm N2 Equivalent Standard Configuration # 42, 31–92 sccm N2 Equivalent Standard Configuration # 43, 93–280 sccm N2 Equivalent Standard Configuration # 44, 281–860 sccm N2 Equivalent Standard Configuration # 45, 861–2600 sccm N2 Equivalent Standard Configuration # 46, 2601–7200 sccm N2 Equivalent Standard Configuration # 47, 7201–15000 sccm N2 Equivalent Standard Configuration # 48, 15001–30000 sccm N2 Equivalent A X Auto Zero (Included) Auto Zero (Not Included) A X 0°C Reference Calibration (Standard) 21°C Reference Calibration (Normal) Customer To Specify Temperature 000 021 XXX GF100 Product Configuration C C X O XX k d f h l l d 5 Pin DeviceNet™ M8 Cable Adapter to Cardedge (w/out VTP), RS485 through RJ11 Jacks; Display & Overlay w/ 180° Orientation 9 Pin D with RS-485 (UDG9), Display/Overlay w/180° Orientation 9 Pin D with RS-485 (UDG9) Cable Adapter to MKS 15 Pin D (UDK 15) 5 Pin DeviceNet™ M8 w/Analog Brooks Instrument, LLC 915 Enterprise Boulevard Allen TX 75013 USA Telephone 972 359 4000 Facsimile 972 359 4100 www.BrooksInstrument.com