Electronic Flow Meter MassRateTM 5700 - Brooks Instrument - #1

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Data Sheet DS-TMF-5700-MFM-eng October, 2008 DESIGN FEATURES - BENEFITS • Mass flow measurement - No temperature or pressure correction required • Wide range of flow rates - Satisfies most applications • Excellent repeatability - Delivers consistent process/test results • No moving parts - Ensures long-term reliability • Stainless Steel wetted materials - Compatible with most process/test gases • Single sided power input - Simplifies and reduces cost of installation • 0-5 Volt output signal - Allows flow indication, trending and totalizing • European Community CE Certified - Ensures electrical integrity for every application • Supplied by the first ISO-9001 Quality Certified Measurement & Control Company in the world: Brooks Instrument - Ensures a quality instrument for your application Electronic Flow Meter MassRateTM 5700 DESCRIPTION The Brooks® MassRate 5700 is a gas flow meter specially designed to satisfy the needs of purge gas, process analysis and analytical flow measurement applications. The MassRate 5700 utilizes a proven thermal mass flow sensor which provides excellent repeatability, wide turndown and an electrical output signal. It has a rugged all stainless steel construction and no moving parts providing superior corrosion resistance and long- term reliability. The MassRate 5700 is an economical meter with an electrical output signal making it ideal for replacing turbine meters, variable area meters and other volumetric devices. MassRate 5700 TYPICAL APPLICATIONS • Purge gas measurement • Gas analyzers • Particle monitors • Moisture analyzer • Air/oxygen gauging equipment • Medical anesthesia/oxygen systems • Gas blanketing • Exhaust flow measurement • Aeration/Foaming • Hydrogen and oxygen gas measurement to burner feed • Bubbler system monitor • Fermentation gas feed Figure 1 Gas Analyzer Application Diagram SPECIFICATIONS Performance Standard Flow Ranges (*): 0-10 ml/min 0-1 liters/min 0-20 ml/min 0-2 liters/min 0-50 ml/min 0-5 liters/min 0-100 ml/min 0-10 liters/min 0-200 ml/min 0-20 liters/min 0-500 ml/min 0-50 liters/min *Nitrogen, 760 torr Reference Pressure, Reference Temperature defined by User Rangeability: 20:1 Repeatability: 0.5% full scale Accuracy: 5% F.S. including linearity