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Data Sheet
DS-PR-SLA5800-RT-eng
August, 2009
Brooks® Model SLA5840
Model SLA5840A
Analog I/O
Delta Class Remote Transducer
Pressure Controller / Flowmeter
Model SLA5840D
Digital I/O DeviceNet
GENERAL FEATURES:
• Pressure Control and Flow Management
• Flow accuracy: ±1% of rate or (setpoint) including
linearity.
• Digital software can store 10 selectable calibration
curves. Spares inventories are reduced by limiting
the number of individual MFCs required, lowering
inventory holding costs.
• DeviceNet Protocol
Control Response:
• Typical Settling Time of less than 800 ms typical for
all step changes. Valve response can be ramped to
tailor process requirements. Actual pressure
response can depend on system design.
• Proprietary adaptive
valve control algorithm is
available which assures that unexpected variations in
pressure do not cause flow to deviate from setpoint.
• Insensitive to mounting attitude
Analog I/O:
• 15-pin
• 0-5 Volt setpoint and flow signals
• Single sided +15 Volt DC power supply
• Separate ‘
valve-override’ signal
• Compatible with Brooks' Model 0150 series secondary
electronics
DeviceNetTM Communication Option:
• Easy Commissioning and Reduced System Wiring
• Accessibility of sensor,
valve, calibration, tuning,
diagnostic, and other internal data, to support fast
commissioning.
• MAC-ID, Baudrate rotary switches, and two bi-color
status LEDs - to ease setup and addressing as well
as status confirmation.
• Standard Device-Profile, ODVA certified
• Capable of: Polled, Cyclic, &
Change-of-State messaging.
DESCRIPTION
The Brooks® Model SLA5840 Pressure Controller/
Flowmeter controls pressure while also measuring
flow rate. The Model SLA5840 receives a remote
pressure transducer signal, and using adjustable
integral PID control electronics and control
valve, will
maintain a desired set pressure. In addition to the
pressure control function, the Model SLA5840
provides a 0-5 V signal which is linear with mass flow
rate. The Model SLA5840 can also be configured as a
mass flow controller for calibration or test purposes.
Brooks now offers control interface with DeviceNetTM,
a high-speed (up to 500k baud) digital communication
network adopted by the Semiconductor industry.
Brooks' communications capabilities and device-profile
have been certified by the ODVATM (Open DeviceNet
Vendors’ Association). Other network protocols are in
development. Talk to your Brooks representative
about your specific needs.
The MFC's microprocessor uses a multi-point
calibration curve, to deal with residual sensor nonlinearity,
yielding a highly accurate process signal. The
microprocessor then executes Brooks’ proprietary
Adaptive Valve Control algorithm to rapidly adjust the
valve actuation to match setpoint.
