Brooks® Smart (DMFC) MFC/MFM - Brooks Instrument - #1

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Data Sheet DS-TMF-5800S-MFC-eng April, 2008 Models 5800-S Series 1 Brooks® Smart (DMFC) MFC/MFM Brooks Smart (DMFC) Mass Flow Meters and Mass Flow Controllers Benefits: • Compact design, provides mass flow measurement and control of gases from 3 mln/min. full scale up to 2500 ln/min. • High accuracy, repeatability and immunity to temperature changes improve the performance of your process. • Provided with adaptive control algorithm to ensure fast response, robust and stable control of gas flow applications even under varying process conditions. • Long term reliability, negligible zero drift ensures reliable measurement and control. • Fully Customer programmable PID control, I/O’s and alarms. • Smart technology, available for elastomer-, metal sealed-, or ultra high purity (UHP) Mass Flow Meters/Controllers. • Industrial Downport (ISA 76.00.02) • Smart technology, available with PROFIBUSDP communication and Analogue I/O’s. • Smart technology, available with selectable Analogue I/O’s and digital communication (HART based) via RS 232 or RS 485. With digital communications you can operate easily with most Windows based applications which support DDE. • Easy and cost effective installation (fit-and forget) and high operating integrity through self-monitoring. • Thousands of Brooks Smart Mass Flow Meters and Controllers have been installed and operate successfully in a variety of industries under various process conditions. • Designed, developed, manufactured and supplied by the first ISO-9001 Quality Certified M&C company in the world: Brooks Instrument. • ATEX zone II according to KEMA 03ATEX1433 X