Brooks® Models SLAMf50, SLAMf51, SLAMf53 Mass Flow Controllers and Models SLAMf60, SLAMf61, SLAMf63 Mass Flow Meters - Brooks Instrument - #1

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1 Brooks® Digital MFC's and MFM's Data Sheet DS-TMF-SLAMf-MFC-eng November, 2008 Model SLAMf50S Analog I/O MFC with RS-485 Model SLAMf53D Digital I/O DeviceNetTM MFC Model SLAMf50F Digital I/O FOUNDATION® Fieldbus MFC General Features: • Wide FS flow range for measurement and control of gases from 3 ccm to 2500 lpm, (N2 eq.) • Accuracy: + 1.0% of rate up to 1100 lpm; 1% FS including linearity above 1100 lpm. • Industry leading sensor stability. Long term drift performance of < 0.2% per year. Increased system throughput by reducing maintenance and eliminating periodic recipe adjustment. • Storage of up to 10 selectable calibration curves. Spares inventories are reduced by limiting the number of individual MFC/M's required, lowering inventory holding costs. • NEMA 4X and IP66 weatherproof protection for 'Hosedown' applications such as: Food, Beverage, Pharmaceutical and Biotech. Control Response: • Settling Time of less than 1 second. (better on request). • Soft start can be used to tailor MFC performance to process requirements. • Proprietary Adaptive Valve Control algorithm is available which assures that unexpected variations in process pressure do not cause flow to deviate from setpoint. Analog I/O Option: • Cable Gland Opening (PG-11) • Conduit Opening 1/2" NPTF or M20 x 1.5 • 0(1)-5 Volt or 0(4)-20 mA setpoint and flow signals • Single sided 24 Volt DC power supply (13.5-27 volts DC range). • Separate Valve-Override signal • Precision 5 Volt Reference Output signal • Compatible with Brooks' Model 0150 series secondary electronics • TTL (open collector) Alarm Output signal Digital Communication Options: • DeviceNetTM, ODVATM certified • FOUNDATIONTM Fieldbus, H1 Certified • HART® based RS-485 multidrop DESCRIPTION Brooks Instrument’s SLAMf Series is an elastomer sealed digital thermal mass flow measurement and control instrument, which offers unparalleled flexibility and performance. The SLAMf Series MFC is designed for use in advanced gas handling systems. The result is the most accurate, repeatable, and responsive MFC on the market today! Brooks® Models SLAMf50, SLAMf51, SLAMf53 Mass Flow Controllers and Models SLAMf60, SLAMf61, SLAMf63 Mass Flow Meters