Brooks® Models SLAMf50, SLAMf51, SLAMf53 Mass Flow Controllers and Models SLAMf60, SLAMf61, SLAMf63 Mass Flow Meters - Brooks Instrument - #8

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8 Data Sheet DS-TMF-SLAMf-MFC-eng November, 2008 Brooks® Digital MFC's and MFM's TRADEMARKS Brooks ......................................................... Brooks Instrument, LLC DeviceNet ..................... Open DeviceNet Vendors Association, Inc. FOUNDATION Fieldbus ........................................ Fieldbus FOUNDATION HART ........................................ HART Communications Foundation ITK .................................................................... Fieldbus FOUNDATION Kalrez .......................................................... DuPont Dow Elastomers ODVA............................ Open DeviceNet Vendors Association, Inc. Teflon ............................................... E.I. DuPont de Nemours & Co. VCO .................................................................................... Cajon Co. VCR .................................................................................... Cajon Co. Viton .............................................. DuPont Performance Elastomers BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application, along with outstanding service and support to back it up. We operate first class repair facilities located around the world to provide rapid response and support. Each location utilizes primary standard calibration equipment to ensure accuracy and reliability for repairs and recalibration. The primary standard calibration equipment to calibrate our flow products is certified by our local Weights and Measures Authorities and traceable to the relevant International Standards. Visit www.BrooksInstrument.com to locate the service location nearest to you. START-UP SERVICE AND IN-SITU CALIBRATION ƒÜ Brooks Instrument can provide start-up service prior to operation when required, if necessary under in-situ conditions, and the results will be traceable to the relevant international quality standards. CUSTOMER SEMINARS AND TRAINING ƒÜ Brooks can provide customer seminars and dedicated training to engineers, end users and maintenance persons. HELP DESK In case you need technical assistance: Americas 1-888-554-FLOW Europe +(31)-318-549-290 Within Netherlands 0318-549-290 Asia +011-81-3-5633-7100 Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice. Figure 9 Model SLAMf63 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT) with Flanged Connections MFM