Brooks® Models 5866E & 5866M Elastomer and Metal Seal Pressure Controllers - Brooks Instrument - #1

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1 Brooks® Models 5866E & 5866M Data Sheet DS-PR-5866E-5866M-PC-eng November, 2008 Brooks® Models 5866E & 5866M Elastomer and Metal Seal Pressure Controllers Model 5866E Elastomer Seal Pressure Controller Model 5866M Metal Seal Pressure Controller GENERAL FEATURES • Integral pressure transducer • Electropolished wetted surfaces (optional) • High accuracy • High leak integrity • Suitable for upstream or downstream control • Normally closed valve (normally open valve optional) • Current or voltage signal • External valve control capability • Electrically activated valve override • Wide range of full scale pressures • Eliminates droop, hysteresis and boost