Brooks® Model 5851EM Metal Seal High Flow Mass Flow Controller - Brooks Instrument - #1

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1 Data Sheet DS-TMF-5851EM-MFC-eng October, 2008 Brooks® Model 5851EM Brooks® Model 5851EM Metal Seal High Flow Mass Flow Controller D Connector Card Edge GENERAL FEATURES • High leak integrity (less than 10-10 atm-cc/sec He) • Electropolished wetted surfaces (optional) • Enhanced process (5 Ra avg.) internal surface finish (optional) • Normally closed valve (normally open valve optional) • Particulate free • High purity VAR 316L Stainless Steel • High flow capability 100 slpm N2(200 slpm H2) • Fast response to command changes • Helium leak check ports • Class 100 assembly and calibration • Negligible flow overshoot/undershoot • Insensitive to mounting attitude • TTL compatible "valve off" function • Electrically activated valve override • Low command flow cutoff • Available with all popular process connections • 0(4)-20mA I/O, 24 Vdc power supply (optional)