Brooks® Mf Series Smart Mass Flow Meters and Controllers - Brooks Instrument - #9

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9 MODELLISTING BROOKS MF-SERIES SMART MASS FLOW METERS / CONTROLLERS BASE MODEL NUMBER DESCRIPTION MF60S/AA MASS FLOW METER; F.S. FLOWRANGES: 0.003 - 0.008 ln/min. MF60S/AC MASS FLOW METER; F.S. FLOWRANGES: 0.008 - 30 ln/min. MF61S/AD MASS FLOW METER; F.S. FLOWRANGES: 20 - 100 ln/min. MF63S/AE MASS FLOW METER; F.S. FLOWRANGES: 100 - 200 ln/min. MF63S/AF MASS FLOW METER; F.S. FLOWRANGES: 200 - 300 ln/min. MF63S/AG MASS FLOW METER; F.S. FLOWRANGES: 300 - 400 ln/min. MF63S/AH MASS FLOW METER; F.S. FLOWRANGES: 400 - 500 ln/min. MF63S/AJ MASS FLOW METER; F.S. FLOWRANGES: 500 - 600 ln/min. MF63S/AK MASS FLOW METER; F.S. FLOWRANGES: 600 - 700 ln/min. MF63S/AL MASS FLOW METER; F.S. FLOWRANGES: 700 - 800 ln/min. MF63S/AM MASS FLOW METER; F.S. FLOWRANGES: 800 - 900 ln/min. MF63S/AN MASS FLOW METER; F.S. FLOWRANGES: 900 - 1000 ln/min. MF63S/A1 MASS FLOW METER; F.S. FLOWRANGES: 1001 - 1100 ln/min. MF63S/A2 MASS FLOW METER; F.S. FLOWRANGES: 1101 - 1300 ln/min. MF63S/A3 MASS FLOW METER; F.S. FLOWRANGES: 1301 - 1600 ln/min. MF63S/A4 MASS FLOW METER; F.S. FLOWRANGES: 1601 - 1900 ln/min. MF63S/A5 MASS FLOW METER; F.S. FLOWRANGES: 1 901 - 2200 ln/min. MF63S/A6 MASS FLOW METER; F.S. FLOWRANGES: 2201 - 2500 ln/min. MF64S/AO MASS FLOW METER; F.S. FLOWRANGES: 18 - 80 m3n/h. (1,5") MF64S/AP MASS FLOW METER; F.S. FLOWRANGES: 60 - 140 m3n/h. (2") MF64S/AR MASS FLOW METER; F.S. FLOWRANGES: 140 - 320 m3n/h. (3") MF64S/AS MASS FLOW METER; F.S. FLOWRANGES: 240 - 540 m3n/h. (4") MF64S/AT MASS FLOW METER; F.S. FLOWRANGES: 540 - 1250 m3n/h. (6") [2D] MF64S/AU MASS FLOW METER; F.S. FLOWRANGES: 970 - 2160 m3n/h. (8") [2D] MF50S/AA MASS FLOW CONTROLLER; F.S. FLOWRANGES: 0.003 - 0.008 ln/min. MF50S/AC MASS FLOW CONTROLLER; F.S. FLOWRANGES: 0.008 - 30 ln/min. MF51S/AD MASS FLOW CONTROLLER; F.S. FLOWRANGES: 20 - 100 ln/min. MF53S/AE MASS FLOW CONTROLLER; F.S. FLOWRANGES: 100 - 200 ln/min. MF53S/AF MASS FLOW CONTROLLER; F.S. FLOWRANGES: 200 - 300 ln/min. MF53S/AG MASS FLOW CONTROLLER; F.S. FLOWRANGES: 300 - 400 ln/min. MF53S/AH MASS FLOW CONTROLLER; F.S. FLOWRANGES: 400 - 500 ln/min. MF53S/AJ MASS FLOW CONTROLLER; F.S. FLOWRANGES: 500 - 600 ln/min. MF53S/AK MASS FLOW CONTROLLER; F.S. FLOWRANGES: 600 - 700 ln/min. MF53S/AL MASS FLOW CONTROLLER; F.S. FLOWRANGES: 700 - 800 ln/min. MF53S/AM MASS FLOW CONTROLLER; F.S. FLOWRANGES: 800 - 900 ln/min. MF53S/AN MASS FLOW CONTROLLER; F.S. FLOWRANGES: 900 - 1000 ln/min. MF53S/A1 MASS FLOW CONTROLLER; F.S. FLOWRANGES: 1001 - 1100 ln/min. MF53S/A2 MASS FLOW CONTROLLER; F.S. FLOWRANGES: 1101 - 1300 ln/min. MF53S/A3 MASS FLOW CONTROLLER; F.S. FLOWRANGES: 1301 - 1600 ln/min. MF53S/A4 MASS FLOW CONTROLLER; F.S. FLOWRANGES: 1601 - 1900 ln/min. MF53S/A5 MASS FLOW CONTROLLER; F.S. FLOWRANGES: 1 901 - 2200 ln/min. MF53S/A6 MASS FLOW CONTROLLER; F.S. FLOWRANGES: 2201 - 2500 ln/min. MECHANICAL CONNECTIONS 1A WITHOUT ADAPTORS (9/16"-18" UNF) (ONLY FOR MF50/60/51/61/53/63) 1B 1/4" TUBE COMPRESSION FITTINGS (ONLY FOR MF50/60/51/61) 1C 1/8" TUBE COMPRESSION FITTINGS (ONLY FOR MF50/60/51/61) 1D 3/8" TUBE COMPRESSION FITTINGS (ONLY FOR MF50/60/51/61) 1E 1/4" VCR (ONLY FOR MF50/60/51/61) 1F 1/4" VCO (ONLY FOR MF50/60/51/61) 1G 1/4" NPT (ONLY FOR MF50/60/51/61) 1H 6mm TUBE COMPRESSION FITTINGS (ONLY FOR MF50/60/51/61) 1J 10mm TUBE COMPRESSION FITTINGS (ONLY FOR MF50/60/51/61) 1K 1/4" BSP (F) (ONLY FOR MF50/60/51/61) 1Y ½" BSP (F) (ONLY FOR MF53/63) 1Z 1" BSP (F) (ONLY FOR MF53/63) 2A 1 1/16" - 12SAE/MS (ONLY FOR MF53/63) 2B ½" TUBE COMPRESSION FITTINGS (ONLY FOR MF50/60/51/61/53/63) 2C 3/4" TUBE COMPRESSION FITTINGS (ONLY FOR MF53/63) 2D 1" TUBE COMPRESSION FITTINGS (ONLY FOR MF53/63) 2E ½" NPT(F) (ONLY FOR MF53/63) 2F 1" NPT(F) (ONLY FOR MF53/63) 2G 1½" NPT(F) (SEE OPTION "B") (ONLY FOR MF53/63/64) 2H ½" VCO (200 ln/min. max.) (ONLY FOR MF50/60/51/61/53/63) 2J 3/4" VCO (ONLY FOR MF53/63) 2K ½" VCR (200 ln/min. max.) (ONLY FOR MF50/60/51/61/53/63)