Brooks® Metal-Sealed Pressure Controllers SLA7810/20 - Brooks Instrument - #1

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1 Data Sheet DS-PR-SLA7800-PC-eng November, 2008 Model SLA7810 & SLA7820 General Features: • 1-1/8" (28.58 mm) Mechanical Platform • High Performance Co-Planar valve • All wetted surfaces are 32 Ra maximum to maintain particle, moisture and contamination free process conditions. • All-Metal seals, High leak integrity (less than 1x10-10 atm-cc/sec He) • Accuracy: ±0.5% F.S., including linearity and hysteresis to assure device is controlling precisely at the desired level. • Digital Communication options offer easy commissioning and reduced system wiring. • Device can store 10 selectable pressure applications • CE Compliant DeviceNetTM Communication Option: • Easy Commissioning and Reduced System-Wiring • Accessibility of sensor, valve, calibration, tuning and diagnostic data • MAC-ID, Baudrate rotary switches, and two bi-color status LEDs • Vendor Specific Device-Profile, ODVATM certified • Capable of: Polled, Bit-Strobe, Cyclic, & Change-of-State messaging, plus UCMM Analog I/O: • 15-pin • 0-5 Volt command-setpoint and pressure signals • Single sided 15 Volt DC power supply • Separate ‘valve-override’ signal • Compatible with Brooks' Model 0150 Series secondary electronics Model SLA7810D/SLA7820D Digital I/O DeviceNet Pressure Controller Upstream Model SLA7810A/SLA7820A Analog I/O Pressure Controller Upstream Brooks® Metal-Sealed Pressure Controllers Analog I/O Pin Connections: Signal: 15-pin D-conn Setpoint/Command Common 1 Pressure Signal Out 2 15V Power Supply 5 15V(unused) 6 Setpoint/Command Input 8 Power Supply Common 9 Output Signal Common 10 +5V Reference 11 Valve Override 12 Application Select Pin 13 Not Connected 3, 4, 7,14,15