Brooks® Flomega, Liquid MFC's / MFM's - Brooks Instrument - #1

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Data Sheet DS-TMF-FM-MFC-eng April, 2008 Models 5881, 5882, 5891, 5892 1 • Very low liquid flow from 1 to 1000 grams/hour • Unique thru-flow patented sensor and in-line valve design • Assured process accuracy and repeatability • Long-term reliability, CE certified • Reduced maintenance • Improved safety • Designed, developed, manufactured and supplied by the first ISO-9001 Quality Certified M&C company in the world: Brooks Instrument OPTIONS • Zone I certified: ATEX approved II 2 GD EEx d IIB T6 ... T4 T100ºC • Zone II certified: ATEX approved II 3 GD EEx nV II T4 T75ºC • SANITARY (steriliseable) sensor, designed for foodand pharmaceutical applications Description The patented FLOMEGA thru-flow liquid mass flow meter design is the heart of the system. All models are selfcontained with signal conditioning electronics and housed in weather-proof IP-65 certified enclosures. In addition the Flomega liquid controller also includes an integrally mounted control valve and controller electronics. Model 5881, Flomega, Mass Flow Controller for Liquid Flow Application Flomega liquid mass flow meter for accurate measurement and in addition as liquid mass flow controller has been especially designed to measure and control very low flows of liquid from 1 to 1000 BENEFITS • Eliminates the necessity of batch processing Higher productivity Lower costs • Virtually insensitive to process temperature, pressure, density or viscosity changes (specific heat value dependent). • High reliability Ensures proper process recipe • Verify and calibrate other instruments and provides consistent process results • Packaged in rugged enclosure Insensitive to mounting position • Easy installation • Safe with toxic and volatile liquids • Can be used in many industrial applications • Applicable for food and pharmaceutical applications where sterilisation is important FEATURES • Continuous mass flow measurement and control for difficult low liquid flowranges • Superiour thru-flow design mass flow sensor • Enhanced performance • High accuracy and repeatability • Stand-alone modular design • Jumper selectable input/output signal configuration • Closed system • certified for use in hazardous area Zone I or Zone II • Sanitary designed sensor Brooks® Flomega, Liquid MFC's / MFM's