4800 Series Ultra-Fast Responding Mass Flow Controllers & Meters - Brooks Instrument - #1

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1 The Brooks 4800 Series features a broad flow range, compact size, a variety of analog and digital I/O options, a MEMS-based sensor that provides lightning fast response times, and many other benefits for a variety of applications. The 4800 Series of mass flow controllers and mass flow meters is fully RoHS compliant and is an excellent choice for measurement and control of many common gases including air, N2, O2, Ar, He, H2, CO2, CO, N2O, CH4, C3H6, and C3H8. The optional Local Operator Interface (LOI) provides a convenient user interface to view, control, and configure the 4800 Series devices eliminating the need for remote secondary electronics. The 4800 Series MEMS-based sensor provides lightning fast response times. The 4800 Series utilizes a Micro Electro Mechanical System (MEMS) based thermal sensor. Similar to typical thermal sensors, it measures a change in temperature to determine mass flow rate. The difference is that gas flows directly across the sensor, achieving extremely fast response times. Data Sheet 4800 Series Thermal Mass Flow Overview Product Description Ultra-Fast Responding Mass Flow Controllers & Meters Model 4850 Figure 1 Gas Flow Across the MEMS Sensor