IQ+FLOW® Chip-sensor based Mass Flow Meters/Controllers for gases - Bronkhorst - #1

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Micro Fluidic Mass Flow and Pressure Meters/Controllers with high intrinsic quality IQ+FLOW 3-channel Mass Flow Controller > Introduction Bronkhorst High-Tech B.V, the European market leader in thermal Mass Flow Meters/Controllers and Electronic Pressure Controllers, has over 25 years of experience in designing and manufacturing precise and reliable measurement and control devices. With a wide range of instruments, Bronkhorst High-Tech offers innovative solutions for many different applications in many different markets. The instruments are made to customers’ specification, in various styles, suitable for use in laboratory, industrial environment, hazardous areas, semiconductor or analytical installations. > Micro fluidic concept The use of micro fluidic devices for research and analytical purposes has some important advantages. Firstly, because the internal volumes within the instruments are very small, the analysis will be faster and the amount of reagents and analytes used can be reduced. The latter is especially significant for expensive reagents. Furthermore, the physical dimensions are much smaller than those of conventional devices. This enables Life Sciences system integrators to downscale the size, inherently reducing the costs of ownership of their equipment. Also, the availability of compact and lightweight instruments could lead to the development of portable systems. > World’s smallest Mass Flow / Pressure Controllers Previously, conventional mass flow and pressure meters and controllers have needed a footprint of 1.5”, as for instance specified in the NeSSITM system. Now, and in close co-operation with the Netherlands organisation for applied scientific research TNO, Bronkhorst High-Tech has developed the IQ+FLOW mass flow sensor. Due to the use of micro system technology (MST), Bronkhorst has been able to halve the footprint dimension to 0.75”, thereby realising ultra compact flow controllers for flow rates from 0,2 to 5000 sccm (mln/min) and pressure controllers for 0.3 to 150 psi. > High intrinsic quality, featuring… u Compact assembly ensures space efficiency u Economical solution, low cost of ownership u Tubeless construction reduces potential leak points u Top-mount modules; easily accessible u Pre-tested “Plug and Play” units, reducing custom testing requirements u Analog or digital communication Actual size