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Mass flow controller, Mass flow-meter, Digital flow-meter, Flow regulator, Thermal mass flow-meter
Text version of the page
| SENSORS FOR MASS FLOW AND PRESSURE | ||||||||||||||||||||||||||||||||||||||||||
| "CEM" Liquid Delivery System with Vapour Control | ||||||||||||||||||||||||||||||||||||||||||
| "novi | ||||||||||||||||||||||||||||||||||||||||||
| Liquid Flow Control | Carrier Gas Control f | |||||||||||||||||||||||||||||||||||||||||
| Liquids (selection of some references) • ETOH • TEOS • HMDS •TIBA • SiHCb •TiCU • SiH3Cl3 •TMB • TCA •Water • Cupraselect™ •Hydrocarbons (such as Acetone, Alcohol, Butanol, Ethanol, Hexane, Methanol, etc.) | ||||||||||||||||||||||||||||||||||||||||||
| Controlled Evaporai o« Mixe« et ? | ||||||||||||||||||||||||||||||||||||||||||
| CEM Mixing chamber for liquid and carrier gas with heat exchanger for total evaporation | ||||||||||||||||||||||||||||||||||||||||||
| INTRODUCTION In a number of processes 2 or more components must be mixed together. In instances where it comprises a vapour of a liquid in a carrier gas, traditional "Bubbler Systems" and the more recent "Vapour Source Controllers" have been used. These devices, however, can often not handle sufficient quantities of liquid with a low vapour pressure, or perform in an imperfect way. Moreover, they cannot instantaneously provide vapour of a mixture of liquids with different vapour pressures. Bronkhorst High-Tech B.V. have therefore developed a unique patented system to realise Mass Flow Control of Vapours with an innovation: the "CEM"-Liquid Delivery System (LDS). It can be applied for atmospheric, pressurized and vacuum processes. | DESCRIPTION At room temperature the liquid, for instance TEOS, HMDS, Cupraselect or water, is drawn from a container with an inert gas blanket, or membrane, and measured by a liquid mass flow meter type u-FLOW or LIQUI-FLOW®. The required flow rate is controlled to the setpoint value by a control valve (C) forming an integral part of the patented liquid flow and carrier gas mixing valve (M). The then formed mixture is subsequently led into the evaporator to achieve total evaporation (E). This explains the abbreviation of "CEM" viz.: Control - Evaporation - Mixing, the 3 basic functions of the Liquid Delivery System. FEATURES • accurately controlled gas/liquid mixture • fast response • high reproduceability • very stable vapour flow • flexible selection of gas/liquid ratio • lower working temperature than conventional systems | |||||||||||||||||||||||||||||||||||||||||
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| BRONKHORST HIGH-TECH B.V. Nijverheidsstraat 1a, 7261 AK Ruurlo, Netherlands Telephone: +31 573 458800 Telefax: +31 573 458808 Internet: www.bronkhorst.com E-mail: sales@bronkhorst.com | ||||||||||||||||||||||||||||||||||||||||||