EL-FLOW® Metal Sealed Gas Mass Flow Meters / Controllers - Bronkhorst - #1

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METAL SEALED Digital Mass Flow / Pressure Meters and Controllers > Introduction Bronkhorst High-Tech B.V., European market leader in thermal Mass Flow Meters/Controllers and Electronic Pressure Controllers, has many years of experience in designing and manufacturing precise and reliable measurement and control devices. With a wide range of instruments, Bronkhorst High-Tech offers innovative solutions for many different applications in many different markets. The instruments are made to customers’ specification, in various styles, suitable for use in laboratory, industrial environment, hazardous areas, semiconductor or analytical installations. > Metal sealed Since 1989 Bronkhorst High-Tech manufactures metal sealed Mass Flow and Pressure Meters/Controllers, designed especially to meet the requirements of the semicon market as well as other high purity gas applications. The instruments feature high surface quality and are of modular construction with metal-to-metal seals that ensure long-term leak tightness. Metal sealed Mass Flow Meters/Controllers can be supplied in ranges starting from 0.1…5 sccm up to 0.6…100 slm (based on N2) or even higher on request. Metal sealed Pressure Meters/Controllers are available in pressure ranges from 0.1…5 psi up to 18…900 psi absolute or gauge. > State of the art digital design Todays instruments are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response (settling time t98 down to 500 msec). The main digital pc-board contains all of the general functions needed for measurement and control. The latest EL-FLOW® design features Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency. For the convenience of the customer Bronkhorst provides free and easy-to-use configuration software tools. In addition to the standard RS232 output the instruments also offer analog I/O. Furthermore, an optionally integrated interface board provides DeviceNet™, Profibus-DP®, Modbus-RTU or FLOW-BUS protocols. > General features u patented metal-to-metal seal construction ensures long-term leak tightness (to atmosphere) u electropolished wetted parts u fast response, excellent repeatability u flow ranges from 0.1...5 sccm up to 0.6...100 slm N2-equivalent (higher on request) u Multi Gas / Multi Range functionality u optional solutions for low pressure drop or vacuum applications u pressure ranges from 0.1...5 up to 18...900 psi u optional surface mount constructions (c-seal / w-seal) u compliant with RoHS directives > Digital features u DeviceNetTM, Profibus-DP®, Modbus-RTU or FLOW-BUS slave; RS232 interface u rotary switches for selecting node address and the DeviceNetTM data rate u high accuracy, ± 0.8% RD + ± 0.2% FS u storage of max. 8 calibration curves u alarm and counter functions u single rail power supply: +15 or +24 Vdc