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vacuum&ultraclean

Vacuum & Ultraclean Motion Control - 55037 Vacuum & Ultrahigh-VacuumPicomotor ™ Actuators

•Vacuum compatible to as low as 10

–9

Torr•<30-nm incremental motion in a compact package •Set-and-forget long-term stability—these actuators stay put Picomotor actuators are idealdevices for motorizing fine-positioning stages andmounts in your opti-cal or mechanicalsystems. They havebetter than 30-nmincremental motionwith minimal back-lash, and can exert a5-lb (22-N) force.Moreover,they have long-termstability and the ability to hold theirposition with no power applied. These last two features make the Picomotor actuators unique among motion-control devices and are ideal for typical set-and-forget applications. And, with a tested lifetime of more than a billion steps, you can integrate them into your system with confidence.For vacuum compatibility, we offer two versions:“-V” and “-UHV”. In both versions, we use spe- cial low-outgassing materials and adhesives, and clean assembly practices. Both come with short Teflon “V” Our standard vacuum-compatible option is rated to 10

–6

Torr. This is typically adequatefor moderate vacuum applications. “UHV” The ultrahigh-vacuum compatibleoption is rated to 10

–9

Torr. These versionsare suitable for high to ultrahigh vacuum. For semiconductor applications (e.g. UV and EUV),please contact us for sulfur-free versions.As with all of our Picomotor™ actuators, these are easily incorporated into OEMdesigns for linear actuation as well as into optical mounts and stages for precision tip-tilt beam-steering adjustments. Use the Model 8341-V or 8341-UHV for times when you want rotation without translation.Use our modular Intelligent Picomotor drivermodules with the Models 83XX-V and 83XX- UHV to build a system incorporating standard and vacuum-compatible Picomotor actuators on the same control network.

Models 8341-UHV, 8301-UHV, 8321-UHV, and 8302-UHV

U.S. Patents #5,394,049 & #5,410,206

®

-coated leads so you can makeconnections to your vacuum chamber feedthrough. (We provide a cable to connectfrom your feedthrough to your driver.)

2.21" (56.1) 2.23" (56.5) for 8301-UHV 2.83" (63.5) for 8302-UHV 1.18" (30.0)0.70"(17.7)0.60"(15.2) 1.31" (33.3)0.81" (20.6)0.60"(15.2) stoppernut stoppernut 0.20"(5.1) 0.080"(2.03)0.34" (8.6) 0.20"(5.1) 0.63" (16.0) 0.080"(2.03)0.34" (8.6) 0.63" (16.0) 1.27"(32.2)0.64"(16.4) 1.27"(32.2)0.64"(16.4) 0.19"(4.8) ball 0.63"(16.0)white wire1.75" (44.5) longTeflon 0.02 (0.5)Metal 0.01 (0.3)red wire1.75" (44.5) longTeflon 0.02 (0.5)Metal 0.01 (0.3) 1/8" Hex M12-0.5jam nut 0.19"(4.8) ball 0.55"(14.0)white wire1.75" (44.5) longTeflon 0.02 (0.5)Metal 0.01 (0.3)red wire1.75" (44.5) longTeflon 0.02 (0.5)Metal 0.01 (0.3) 1/8" Hex 3/8-40retainingnut 0.28" (7.1) max0.44" (11.1)0.32"(8.0) 0.16" (4.0)0.37" (9.5)min 0.25" (6.4)max 0.34" (8.6) 0.58"(14.7) 0.58"(14.7)

Models 8353-V and 8301-V Model 8321 Model 830X

U.S. Patent #5,394,049 & #5,410,206 U.S. Patent #5,394,049 & #5,410,206

10

sales@newfocus.com fax: (408) 919–6083