Parcentricity 10 micronIlumination Wavelength 500 nmParfocality 20 micronOperational Bandwidth >200 HzOptical Resolution (FOV1)* 1.6 micronPosition Output Analog Z-Axis Actuator Range 3 mmCleanroom Compatible Customer SpecifiedVertical Precision* 2 micronElectronitcs Interface Customer SpecifiedAutofocus Capture Range* 1000 micronWeight 5.6 kg (12.5 lbs)Laser Detector Wavelength 785 nmOverall Dimensions 15Ҕ X 9 X 4.5Ԕ > Manufacturer reserves the right to change specifications to reflect latest changes in technology and improvements at any time without notice. Export is subject to US Government regulations. size="-1">