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| | Technology | | Working Conditions | |
| | travel mechanism | inertiaL piezo drive | mounting orientation axis horizontal | | |
| | | | magneticfield range 0..31T | | |
| | Size and Dimensions | temperaturerange(/RT,/HV,/UHV) 0..100 °C | | |
| | footprint; height | 24x48; 11.5 mm | temperature range (/LT, /LT/HV, /LT/UHV) 10mK.. 300 K | | |
| | maximum size (outer position) | 24x48; 11.5 mm | max.bakeouttemperature(/UHV,/LT/UHV) 150 °C | | |
| | | | minimum pressure (/RT, /LT) 1E-4 mbar | | |
| | Coarse Positioning Mode | minimum pressure (/HV, /LT/HV) 1E-8 mbar | | |
| | travel (step mode) | 12/20 mm | minimum pressure (/UHV, /LT/UHV) 5E-11 mbar | | |
| | typical minimum step size | 50 nm @300 K,10nm@4K | | | |
| | maximum speed (@ 300 K, no load) | approx. 3 mm/s | Connectorsand Feedthroughs /RT,/LTVersions | all/HV,/UHVVersions | |
| | | | connector type 2-pole pin plug, | two female conn., | |
| | Fine Positioning Mode | 0 0.5 mm, d = 2 mm, | for pin 0 1 mm, | |
| | scan range | 7.5 um@300 K, 1.2 um@4K | connectortype integrated connector | 30 cm cable with connector | |
| | scan resolution | sub-nm resoLution | electricalfeedthrough solution COC230/LT | C0C230/HV,C0C230/UHV | |
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| | Materials (non-magnetic) | | Temperature Dependent Data @ 3OOK | @ 4K (only /LTversions) | |
| | positioner body | Titanium (other materials on request) | inputvoltage range 0 +100V | 0 +100V | |
| | actuator | PZT ceramics | typical actuatorcapacitance 1550 nF | 220 nF | |
| | connecting wires | insulated twisted pair, Cu | typical step size (min max) 0.05 2 urn | 10 500 nm | |
| | weight | 35g | fine positioning range 7.5 um | 1.2 (jm | |
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| | Load | | Accuracy of Movement | |
| | maximum vertical load | 100 g | repeatability ofstep sizes typically 5 % overfull range | |
| | maximum staticforces along the axis | 4N | forward / backward step asymmetry typically 5 % | | |
| | maximum dynamicforce along the axis | 2N | | | |
| | maximum torque on the axis | 10 Ncm | Position Encoder | |
| | | | encoderoptions /NUM, /RES | | |
| | Mounting | | | |
| | frontside mounting | fourthrough hoLes for M2 | | | |
| | backside mounting | fourthreads M2,5x4mm | | | |
| | load mounting | sixthreads M2x3 mm | | | |
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| | Article Numbers | | | |
| | /RTVersion — | /LTVersion -- | | | |
| | /HVVersion - | /LT/HVVersion -- | | | |
| | /UHVVersion - | /LT/UHVVersion -- | | | |
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| | Compatibilitywith Electronics | | | |
| | ANC106 piezo step controller | /RTversion onLy | | | |
| | ANC150 piezo step controller | aLL versions | | | |
| | ANC200 piezo scan controller | aLL versions | | | |
| | ANC300 piezo positioning controller | aLL versions | | | |
| | ANC350 piezo controller | aLL versions | | | |
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| | Examplary Drawingsforthe ANPxlOleXTwith 2Omm travel | |
| | top view | bottom view | side view | | |
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