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| | Technology | | Working Conditions | |
| | travel mechanism | piezo driven leverarm mechanism | mounting orientation | scanner moving vertically | |
| | | | magneticfield range | 0..31T | |
| | Size and Dimensions | temperature range (/RT, /HV, /UHV) | 0..100 °C | |
| | footprint; height | 15x15; 6 mm | temperature range (/LT, /LT/HV, /LT/UHV) 1 K .. 300 K, Test @ 4.2 K | |
| | | | max. bake out temperature (/UHV, /LT/UHV) 150°C | |
| | Fine Positioning Mode | minimum pressure (/RT, /LT) | 1E-4 mbar | |
| | scan range | 4.3 urn @300 K,2um@4K | minimum pressure (/HV, /LT/HV) | 1E-8 mbar | |
| | scan resolution | sub-nm resolution | minimum pressure (/UHV, /LT/UHV) | 5E-11 mbar | |
| | | | | | |
| | Coarse Positioning Mode | | Connectors and Feedthroughs | /RT, /LTVersions all/HV, /UHVVersions | |
| | travel (step mode) | no coarse positioning capability | connectortype | 2-pole pin plug, two female conn., | |
| | | | | 0 0.5 mm, d = 2 mm, for pin 0 1 mm, | |
| | Materials (non-magnetic) | connectortype | 30 cm cable with connector 30 cm cable with connector | |
| | positionerbody | Titanium (other materials on request) | electricalfeedthrough solution | COC230/LT COC230/HV, COC230/UHV | |
| | actuator | PZT ceramics | | | |
| | connecting wires | 2 twisted pairs, Cu wires | Temperature Dependent Data | @ 300K @4K (only /LT versions) | |
| | weight | 4.5g | input voltage range | 0..+60V 0..+150V | |
| | | | typicalactuator capacitance | 2500 nF 340 nF | |
| | Load | typicalstep size(min .. max) | — — | |
| | maximum vertical load | 50g | fine positioning range | 4.3pm@60V 2pm@150V | |
| | maximum torque on the axis | 10 Ncm | | | |
| | maximum bandwidth | 100 Hz | Accuracy of Movement | |
| | | | repeatability | typically0.1 % | |
| | Mounting | resonancefrequency (typically higherthan) 0 | |
| | frontside mounting | two through holes for M1.6 | creep | typically 0.5 - 0.8 % perdecade oftime | |
| | backside mounting | — | linearity | typically 5 -10 % | |
| | load mounting | fourthreads M1.6 | | | |
| | | | | | |
| | Article Numbers | | | |
| | /RTVersion 1002601 | /□"Version 1002604 | | | |
| | /HVVersion 1002602 | /LT/HVVersion 1001588 | | | |
| | /UHVVersion 1002603 | /LT/UHVVersion 1002605 | | | |
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| | Compatibilitywith Electronics | | | |
| | ANC200 piezo scan controller | all versions | | | |
| | ANC300 piezo positioning controller | all versions | | | |
| | ANC350 piezo controller | all versions | | | |
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