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compact rotary stepper positioner - attocube systems AG


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INANOPOSmONING Hsfs eh oof
Issued 2008/9
ANR51
compact rotary stepper positioner with vertical rotation axis
Technology
Working Conditions
travel mechanism
inertial piezo drive
mounting orientation
axis vertical
magneticfield range
0..31T
Size and Dimensions
temperature range (/RT, /HV, /UHV)
0..100°C
footprint; height
15xl5(02O);9.5mm
temperature range (/LT, /LT/HV, /LT/UHV) 10 mK .. 300 K
through holein the middle ofthe axis
0 1.5 mm
max. bakeouttemperature(/UHV,/LT/UHV) 150 °C
minimum pressure (/RT, /LT)
1E-4 mbar
Coarse Positioning Mode
minimum pressure (/HV, /LT/HV)
1E-8 mbar
travel (step mode)
360° endless, both directions
minimum pressure (/UHV, /LT/UHV)
5E-11 mbar
typical minimum step size
1m°@300 K, 0.5m°@4K
maximum speed (@ 300 K, no load)
approx. 10 °/s
Connectors and Feedthroughs
/RT,/LTVersions
all/HV,/UHVVersions
connectortype
2-pole pin plug,
two female conn.,
Fine Positioning Mode
0 0.5 mm, d = 2 mm,
for pin 0 1 mm,
scan range
40m°@300 K,6m°@4K
connectortype
30 cm cable with connector
30 cm cable with connector
scan resolution
u° resolution
electricalfeedthrough solution
C0C230/LT
COC230/HV,COC230/UHV
Materials (non-magnetic)
Temperature Dependent Data
@300K
@ 4K (only/LTversions)
positionerbody
Titanium (other materials on request)
input voltage range
0..+60V
0..+60V
actuator
PZT ceramics
typicalactuator capacitance
1400 nF
200 nF
connecting wires
insulated twisted pair, Cu
typicalstep size (min max)
150 m°
0.5 25 m°
weight
10 g
fine positioning range
40 m°
6m°
Load
Accuracy of Movement
maximum vertical load
30 grepeatability ofstep sizes
typically 5 % over full range
maximum statictorque around axis
0.3 Ncm
forward / backward step asymmetry
typically 5 %
maximum dynamictorque around axis
0.2Ncm
maximum torque perpendicularto axis
5 Ncm
Position Encoder
encoder options
/RES
Mounting
frontside mounting__
backside mounting_two threads M2x3 mm
load mounting_two threads M1.6 x 1 mm
Article Numbers
/RTVersion_1003285_/LTVersion_1003286
/HVVersion_1003287_/LT/HVVersion 1003289
/UHVVersion_1003288_/LT/UHVVersion 1003290
Compatibilitywith Electronics
ANC106 piezo step controller_/RTversion only
ANC150 piezo step controller_allversions
ANC200 piezo scan controller_all versions
ANC300 piezo positioning controller_allversions
Drawings
topview bottomview 3Dview

pageCatalog pdf di En 2012-05-21-27