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Asylum’s MFP NanoIndenter is a true instrumented
indenter and is the first AFM-based indenter that
does not use cantilevers as part of the indenting
mechanism. These characteristics and the use of
state-of-the-art AFM sensors provide substantial
advantages in accuracy, precision and sensitivity
over other nanoindenting systems.
Overview and Advantages
Unlike cantilever indenters, the MFP NanoIndenter
(Figure 1) moves the indenting tip perpendicular to the
surface. This vertical motion avoids the lateral movement
and errors that are inherent in cantilever-based
systems. Compared to conventional commerciallyavailable
instrumented nanoindenters, the MFP Nano-
Indenter provides lower detection limits and higher
resolution measurements of force and indentation depth
with the superior precision of AFM sensing technology.
The indenter is completely integrated with the AFM,
providing the unique ability to quantify contact areas by
performing AFM metrology of both the indenting tip
and the resulting indentation (Figure 2). These direct
measurements enable analysis of material properties with
unprecedented accuracy relative to indirect calculation
methods. The design uses passive actuation through a
monolithic flexure, minimizing drift and other errors in
depth measurement.
The positioning accuracy in the sample plane is subnanometer
using the MFP’s closed loop nanopositioning
sensors. The NanoIndenter Head utilizes advanced
diffraction-limited optics coupled with CCD image
capture for precision navigation of the tip to areas of
interest on the sample.
The MFP Instrumented NanoIndenter
for Quantitative Materials Characterization
MFP NanoIndenter
DATA S H E E T 1 9
Figure 2: Indenting on dentin (left of crack), and enamel
(right) on a human tooth sample. The indentations in
each row (one row is circled) were all created with the
same maximum force. The smaller indents on the enamel
demonstrate that it is harder than the dentin, 70ìm scan.
Sample courtesy D. Wagner and S. Cohen, Weizmann
Institute of Science.
Figure 1: The MFP NanoIndenter intregrates the quantitative capabilities of instrumented nanonindenters with the resolution of
AFM/SPM to provide advanced materials characterization with enhanced accuracy, precision and sensitivity.
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