PrecisionWoRx ZBA® Micropositioner - Applied Precision - #1

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AppliedPrecision® w w w . a p p l i e d p r e c i s i o n . c o m Technical Specifications Applied Precision, LLC Ó 2004 Applied Precision, LLC 1040 12th Avenue NW Rev 032404 Issaquah, WA 98027 TEL: 425.557.1000 www.appliedprecision.com FAX: 425.557.1055 Applied Precision and precisionWoRx ZBA Are registered trademarks of Applied Precision, LLC. The precisionWoRx ZBA actuator provides extremely accurate, sub-micron motion in a compact package for demanding applications in photonics and ultraprecision automation. The Zero- Backlash feature enables dynamic, real-time positioning for complex motion profiles. PERFORMANCE Range: 6 mm, with end-of-travel stops Resolution*: 20 nm Repeatability*: Unidirectional: <± 100.0 nm Bi-directional: <± 150 nm Accuracy*: ± 1.5 mm over 6mm Load Range: 1.0 – 3.0 Kg Life*: Cycles: >10x106 Distance: >120x106 mm (bi-directional) *Using NanoMotion II Micropositioning System Controller with 1.5 Kg axial load. DIMENSIONS (mm) ®