flowPoint® Automated Flow Control System - Applied Precision - #1

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Say goodbye to process tuning time! Tuning gas flow can be a time consuming chore for your mass-flow dependent CVD processes. Traditional manual metering valves require expensive tool downtime, multiple test runs, and great care from an operator to achieve critical specifications. The flowPoint System is your process tuning solution! Applied Precision’s patented micropositioning technology controls a highpurity diaphragm valve* to provide high-resolution, repeatable process set points, enabling precision tuning of gas flows. Automate gas flows remotely and quickly to eliminate down time, multiple test runs, and the tedious adjustment procedure required of manual valves. • Control flows with an easy-to-use operator interface with options for a handheld terminal, a PC using an RS-232 port, or a 0-10 Volt analog input • Quickly tune your process to nominal specification, achieving higher Cpk values without downtime and fewer test runs • Achieve a repeatable process, returning to previous flow rates within 1.0% of full-scale • Tune your process, safely and remotely from as far 15 meters (50 feet) • Replace tedious manual metering valves with an easy to integrate modular system, proven worldwide * The flowPoint actuation technology can be applied to a variety of valve manufacturers and types. Contact Applied Precision for specific applications. Product Specifications AppliedPrecision® flowPoint Automated Flow Control System