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S ERIES

MINI REGULATOR

AP 500

Ultra Compact / Ultra Clean •

Single stage

Operating Parameters

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Stainless steel 316L VARsecondary remelt construction

Source pressurevacuum to 150 psig (10 bar)Delivery pressureAP 501A100 mm Hg absolute to 10 psig (0.7 bar)AP 5020.5 to 30 psig (0.034 to 2 bar) AP 5101to 100 psig (0.07 to 7 bar)Proofpressure500 psig (34 bar) Burst pressure1,000 psig (69 bar)

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Compact size with low internal volume

•

E

High performance with low hysteresis

NGINEERING

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Vacuum to 150 psig (10 bar) inlet

Other Parameters

Inlet/outlet connectors1/4 or 3/8 inch face seal or tube weld Flow coefficient (Cv)0.06 (0.1 HF option) Internal volume0.15 in
D

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Surface mount (IGS) configurations

ATA 3 (2.4 cm
3 )Operating temperature-40°to +160°F(-40°to +71°C) Surface finish15 µin. (0.4 µm) Ra max standard;
—S

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15 slpm flow capacityHF option to 30 slpm

ERIES 10 µin (0.25 µm); 7 µin (0.18 µm); and 5 µin (0.13 µm) optional Inboard leakage2 x 10
-10 sccsOutboard leakage2 x 10

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Designed and manufactured exclusively for UHP semiconductor applications

-9 sccs He at100 psig inlet pressureLeakage across seat4 x 10
AP500M -8 sccs He at 100 psig inlet pressureDeliverypressure rise0.20 psig per 20 psig source pressure drop
(0.4 psig per 20 psig source pressure drop HF option) InstallationSurface
INIREGULATOR

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Sub-atmospheric to low positive pressure delivery

Materials

Series AP 500 SSeries AP 500 SH Type ofServiceNoncorrosiveCorrosive Wetted Parts BodySS 316L secondary remeltSS 316L secondary remeltPoppet/diaphragmSS 316L / Elgiloy
® Hastelloy
® alloy C-22
® /ElgiloyFinishelectropolished and passivatedelectropolished and passivated SeatPCTFE (Vespel
® optional)PCTFE
All specifications subject to change without notice.Vespel ® DuPontElgiloy ® Elgiloy CorporationHastelloy ® C-22 ® Haynes Corporation 687 T ECHNOLOGY W AY N APA ,CA 94558•(707) 259-0102•F AX (707) 259-0117 www.aptech-online.com