General Catalog - Anorad - #39

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Text version of the page

Microglide FP1300 Dimensions (mm)

Carriage mounting holes are made tomeet specific end user requirements. 1005.0 684.0 684.0 729.0 579.0 Air Bearing 2870.0 579.0 1433.6 1097.6 2200.0

Specifications

Performance Specifications Units Model FP1300 Travel
1 (X-Y) mm 1150 x 1360 Feedback System – Optical LinearEncoder Resolution
2 nm 0.5 - 500 Repeatability µm ±0.5 X ±1.0 Y Positioning Accuracy
3 µm ±1.5 X ±2.5 Y Flatness of Travel µm ±3.0 X ±6.0 Y Straightness of Travel µm ±3.0 X ±4.0 Y Orthogonality arc-sec ±3.0 Pitch, Roll, and Yaw arc-sec ±5.0, ±5.0, ±2.5 Maximum Load Capacity
4 kg 100 Maximum Velocity
5 mm/s 500 Maximum Acceleration
4 m/s
2 10 Scanning Velocity
5 mm/s 350 Average Velocity Ripple
6 % 1.0 Position Stability
6 counts ±2
Notes: Specifications are based on overall travel of each axis (significantly better positioningaccuracy is possible over shorter travels) and operation in a controlled environment with Anorad approved vibration isolation system. Additional performance, travel, and configuration options are available. Contact Anorad for details. 1 Additional 3 mm overtravel at each end before hard-stops. 2 Resolutions available to 0.5 nm (8192 x encoder multiplier). 3 After error mapping axes. 4 Load based on lift bearing capacity. Applied load may determine maximum acceleration. 5 Dependent upon system resolution and data rate. 6 Typical dynamics for configured load, acceleration, velocity, resolution and data rate. 39

pageCatalog pdf di En 2012-05-21-27