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Custom Solutions

General Catalog - 11763 Semiconductor “Front End”Atmospheric Wafer Inspection

XY Theta

Air B earin g Sta g e

Custom •Three - axis coplanar air b earing system ( XYTheta ) •One degree Thetamotion via engineered flexures and dual independently driven Y - axes•Eliminates need for separate Theta - axis forwafer alignment•Dynamic yaw and straightness compensation •Resolutions to 1 nm with 1 m / s maximum velocity via proprietary 4096 x encoder multiplication

B umped Wafer Inspection System

• C ost effective hy b rid b earing design• A ir b earing scanning axis atop mechanical b earing step axis•Engineered ceramic matrix composite b eam for maximum stiffness•SEMI S2, S 8 , and C E compliant• C lass 100 cleanroom compati b le

Wafer Inspection Platform

•Four - axis XYZTheta integrated stage design•Granite b ase and overhead b ridge provide high sta b ility to support inspection optics• C ompact ZTheta stages reduce weight for quick step and settle times
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