Text version of the page

Custom Solutions Fast Pump Down Time

Custom A norad takes careful steps to minimize the time your equipment will take to pump down to requiredpressures. Pockets where air can b e trapped are eliminated and the use of porous materials is avoided.Through holes are used where possi b le and vented stainless fasteners are used in all b lind holes.We know how integral our positioning stage can b e to your assem b led equipment and the difficulty ofeffecting certain repairs. Therefore, A norad places extra emphasis on maximizing relia b ility and pays specialattention to service access needs.

Material Compatibility and Contamination Control

b ility. A norad carefully selects all materials for compati b ility and minimal totalmass loss A norad has many years of experience ( TML ) to avoid pro b lems with the manufacturing process. Low vapor pressure lu b uilding precision vacuum compati b le positioning systems and is wellaware of the unique interactions certain materials can have in semiconductor manufacturing applications. Outgassing and vaporization of materials used in stage construction can result in degradation of the system's performance and reduced relia b ricants are used orin some cases b onded surface treatments eliminate the need for lu b ricants. Electroless nickel plating is usedinstead of anodize. A ll wiring is Teflon
® jacketed and terminated with fluxless solders. Hydrocar b ons areavoided to eliminate car b onization. Plastics and paper b ased product la b eling are not used and all adhesivesare determined to b e compati b le.

Low Stray Ma g netic Fields

Many vacuum applications, particularly those incorporating an E -b eam, require extremely low stray magneticfields to avoid process interaction. In these applications, A norad employs various design measures and canachieve <1 milligauss at the product surface. N on - magnetic materials such as ceramic, glass, aluminum, and b erryllium copper may b e used. The placement of motors is considered along with special shieldingtechniques. N onmagnetic actuation methods may b e utilized. Finite element magnetic analysis can determineresults prior to actual construction.

Pac k a g in g , Prep and Cleanliness

A ll A norad vacuum systems are assem b led b y gloved technicians in special cleanrooms. Prior to assem b ly, each component goes through a special cleaning process including vapor degrease. C ertain applications mayalso b e su b jected to a vacuum b ake - out at the component, su b- assem b ly, or final assem b ly stages. A norad can prepare your system for various cleanroom standards, down to C lass 1 operation ( Fed. Std 209E or ISO14644 - 1 ) . Various design and construction techniques are employed to com b at the effects of b oth active andpassive particle generation. A ll sliding surfaces, including seals on b earings, are eliminated. N onscuff ca b lemanagement systems are used with ca b les and wiring that are Teflon sheathed. For Ultra High Vacuum ( UHV ) systems ( pressures less than 10
-8 Torr ) other jacketing materials may b e employed. A norad also works closelywith your engineers to do a system - level analysis, ensuring the cleanest possi b le results in your application.
15