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Angstrom Advanced Inc. Example: Multilayer Structure
3 Surface Rough Layer11.6 nm2 BLT Films321.4 nm1 SiO221.5 nm0 Si1 mm
Experimentaldata
>
Fittingdata
ε
BLT(590)BLT(700)+50
020
40
60
80100
120
BLT(700)BLT(590)+50
> 2 ε
020
40
60
80100 0.51.01.52.02.53.03.54.04.55.05.56.0 Photonenergy(eV)
Example:Thick Film StructureExample:Thin Film Structure1 SiO2 10.0 mm1Au 1.0 nm0 Si 1 mm 0 Si 1 mm
Copyright(C) 2006 Angstrom Advanced. All Rights Rserved.
Instruments for Thin Film and Semiconductor Applications: 639 Granite Street, Suite 222, Braintree, MA, 02184
Tel: 781-519-4765 Fax: 781-519-4766
